A 200μW Eddy Current Displacement Sensor with 6.7nm<sub>RMS</sub> Resolution

Conference paper (2020)

Authors

Matheus Pimenta Cypress Semiconductor, Cork, Student
C. Gürleyük Electronic Instrumentation - EEMCS
Paul Walsh Cypress Semiconductor, Cork
Daniel O’Keeffe Cypress Semiconductor, Cork
M. Babaie Electronics - EEMCS
K.A.A. Makinwa Microelectronics
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Copyright: © 2020 Matheus Pimenta, C. Gürleyük, Paul Walsh, Daniel O’Keeffe, M. Babaie, K.A.A. Makinwa
DOI: https://doi.org/10.1109/VLSICircuits18222.2020.9162849
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Published Date

2020

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.

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