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A 200μW Eddy Current Displacement Sensor with 6.7nmRMS Resolution

Conference Paper (2020)
Author(s)

Matheus Pimenta (Cypress Semiconductor, Cork, Student TU Delft)

Çağri Gürleyük (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Paul Walsh (Cypress Semiconductor, Cork)

Daniel O’Keeffe (Cypress Semiconductor, Cork)

Masoud Babaie (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Kofi Makinwa (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/VLSICircuits18222.2020.9162849 Final published version
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Publication Year
2020
Language
English
Research Group
Electronic Instrumentation
Bibliographical Note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Article number
9162849
Pages (from-to)
1-2
Publisher
IEEE
ISBN (print)
978-1-7281-9943-6
ISBN (electronic)
978-1-7281-9942-9
Event
2020 IEEE Symposium on VLSI Circuits, VLSI Circuits 2020 (2020-06-16 - 2020-06-19), Honolulu, United States
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Abstract

This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.

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