Towards interferometry for dimensional drift measurements with nanometer uncertainty

Journal article (2011)

Authors

D Voigt External organisation

J.D. Ellis Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

AL Verlaan External organisation

RH Bergmans External organisation

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

More Info

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To reference this document use:

http://resolver.tudelft.nl/uuid:e08b0ed7-e444-468b-9402-b627019d32a8

Published Date

2011

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design