Towards interferometry for dimensional drift measurements with nanometer uncertainty
Journal Article
(2011)
Author(s)
D Voigt (External organisation)
JD Ellis (TU Delft - Mechatronic Systems Design)
AL Verlaan (External organisation)
RH Bergmans (External organisation)
J.W. Spronck (TU Delft - Mechatronic Systems Design)
RH Munnig Schmidt (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
DOI related publication
https://doi.org/10.1088/0957-0233/22/9/094029
To reference this document use:
https://resolver.tudelft.nl/uuid:e08b0ed7-e444-468b-9402-b627019d32a8
More Info
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Publication Year
2011
Language
English
Research Group
Mechatronic Systems Design
Issue number
9
Volume number
22
Pages (from-to)
1-5
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