RH Bergmans | TU Delft Repository

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RH Bergmans

Journal article (1)

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1

Towards interferometry for dimensional drift measurements with nanometer uncertainty

Journal article (2011) - D Voigt (author) , JD Ellis (author) , AL Verlaan (author) , RH Bergmans (author) , Jo W. Spronck (author) , Robert Munnig Schmidt (author)