Material structure of microcrystalline silicon deposited with an expanding thermal plasma

Conference Paper (2003)
Author(s)

C Smit (TU Delft - Electronic Components, Technology and Materials)

DL Williamson (External organisation)

MCM van de Sanden (External organisation)

René A.C.M.M. van Swaaij (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2003
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
Nog niet opgevoerd in 2003@en
Pages (from-to)
1-6
ISBN (print)
1-55899-699-0

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