Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)

Rajaraman, V; Craciun, G; Yang, H; Pakula, L.S.; van der Drift, EWJM; Makinwa, Kofi; French, Paddy

Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)

Book chapter (2007)

Authors

V Rajaraman Electronic Instrumentation

G Craciun Electronic Instrumentation

H Yang Electronic Instrumentation

L.S. Pakula Electronic Instrumentation

EWJM van der Drift QN/Kavli Nanolab Delft

Kofi Makinwa Electronic Instrumentation

Paddy French Electronic Instrumentation

Research Group

Electronic Instrumentation

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2007

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Electronic Instrumentation

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