Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)
Book Chapter
(2007)
Author(s)
V. Rajaraman (TU Delft - Electronic Instrumentation)
G Craciun (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
L.S. Pakula (TU Delft - Electronic Instrumentation)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
K.A.A. Makinwa (TU Delft - Electronic Instrumentation)
P.J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:f0ac1eb1-9b00-47a4-9977-bad5cf660e27
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Publication Year
2007
Research Group
Electronic Instrumentation
Pages (from-to)
238-241
ISBN (print)
978-981-270-960-8
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