Print Email Facebook Twitter Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface Title Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface Author Roy, S. Assafrao, A.C. Pereira, S.F. Urbach, H.P. Faculty Applied Sciences Department ImPhys/Imaging Physics Date 2014-05-27 Abstract Inspection tools for nano-particle contamination on a planar substrate surface is a critical problem in micro-electronics. The present solutions are either expensive and slow or inexpensive and fast but have low sensitivity because of limitations due to diffraction. Most of them are also substrate specific. In this article we report how Coherent Fourier Scatterometry is used for detection of particles smaller than ?/4. Merits of the technique, especially, the procedures to improve SNR, its flexibility and its robustness on rough surfaces are discussed with simulated and experimental results. Subject optical inspectionFourier optics and signal processingscattering measurementsscanning microscopy To reference this document use: http://resolver.tudelft.nl/uuid:56253974-e017-498e-8e45-3b5f4f63f682 DOI https://doi.org/10.1364/OE.22.013250 Publisher Optical Society of America ISSN 1094-4087 Source http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-11-13250 Source Optics Express, 22 (11), 2014 Part of collection Institutional Repository Document type journal article Rights © 2014 Optical Society of America Files PDF Roy_2014.pdf 2.06 MB Close viewer /islandora/object/uuid:56253974-e017-498e-8e45-3b5f4f63f682/datastream/OBJ/view