Self-Sealing Complex Oxide Resonators

Journal article (2022)

Authors

M. Lee QN/Steeneken Lab - AS , Kavli institute of nanoscience Delft
M.P. Robin Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
G.J. Verbiest Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Peter G. Steeneken QN/Steeneken Lab - AS , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , Kavli institute of nanoscience Delft
P.G. Steeneken QN/Steeneken Lab - AS , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , Kavli institute of nanoscience Delft
R.H. Guis Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
U. Filippozzi QN/Caviglia Lab - AS , Kavli institute of nanoscience Delft
D. Shin QN/Steeneken Lab - AS , Kavli institute of nanoscience Delft
T.C. van Thiel QN/Caviglia Lab - AS , Kavli institute of nanoscience Delft
Johannes R. Renshof Student, Kavli institute of nanoscience Delft
H.S.J. van der Zant QN/van der Zant Lab - AS , Kavli institute of nanoscience Delft
A. Caviglia Kavli institute of nanoscience Delft, QN/Caviglia Lab - AS
Research Group
QN/Steeneken Lab (AS) (TU Delft)
Copyright: © 2022 M. Lee, M.P. Robin, R.H. Guis, U. Filippozzi, D. Shin, T.C. van Thiel, Stijn P. Paardekooper, Johannes R. Renshof, H.S.J. van der Zant, A. Caviglia, G.J. Verbiest, P.G. Steeneken
DOI: https://doi.org/10.1021/acs.nanolett.1c03498
More Info
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Published Date

2022

Language

English

Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Steeneken Lab

Abstract

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.