High-performance wafer-scale transfer-free graphene microphones

Highly reproducible tissue positioning with tapered pillar design in engineered heart tissue platforms

Recording Neuronal Activity On Chip with Segmented 3D Microelectrode Arrays

Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology

Ionic polymer metal composite-based microfluidic flow sensor for bio-MEMS applications

Resistive and CTAT Temperature Sensors in a Silicon Carbide CMOS Technology

Fabrication of Nanoslits with <111> Etching TSWE Method

Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control

Dual-Gate Fet-Based Charge Sensor Enhanced by In-Situ Electrode Decoration in a MEMS Organs-On-Chip Platform

Microelectromechanical Organs-on-Chip

Enabling actuation and sensing in organs-on-chip using electroactive polymers

FET-based integrated charge sensor for organ-on-chip applications

Fabrication of Al-based superconducting high-aspect ratio TSVs for quantum 3D integration

A Wafer-Scale Process for the Monolithic Integration of CVD Graphene and CMOS Logic for Smart MEMS/NEMS Sensors

MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

Quantum thermometry in optomechanics

Transfer-free graphene-based differential pressure sensor

A miniaturized low power Pirani pressure sensor based on suspended graphene

Vacuum assisted liquified metal (VALM) TSV filling method with superconductive material

A highly miniturized single-chip MOEMS scanner for all-in-one imaging solution