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Hagendoorn, Y. (author), Pandraud, G. (author), Vollebregt, S. (author), Morana, B. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author)Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by...journal article 2022
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Jovic, A. (author), Losilla, Nuria Sanchez (author), Durá, Juan Sancho (author), Zinoviev, Kirill (author), Guivernau, Jose Luis Rubio (author), Margallo-Balbás, Eduardo (author), Mastrangeli, Massimo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45<sup>◦</sup> reflecting mirror that directs the light from the interferometer to the collimator....journal article 2020
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Sarro, Pasqualina M (author), Serra, E. (author)Cavity optomechanics has achieved the major breakthrough of the preparation and observation of macroscopic mechanical oscillators in non-classical states. The development of reliable indicators of the oscillator properties in these conditions is important also for applications to quantum technologies. We compare two procedures to infer the...journal article 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, Pasqualina M (author)Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...journal article 2019
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Pontin, A. (author), Sarro, Pasqualina M (author)We describe a method to control the cavity detuning in optomechanics experiments. This helps accurate measurements of the asymmetry in the motional sidebands, that testify the quantum behavior of the oscillator and quantifies its occupation number.conference paper 2019
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Jovic, A. (author), Pandraud, G. (author), Sanchez Losilla, Nuria (author), Sancho, Juan (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo Balbas, E (author), Sarro, Pasqualina M (author)In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW....journal article 2018
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Jovic, A. (author), Uto, T. (author), Hei, K. (author), Sancho, Juan (author), Sanchez, Nuria (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo, Eduardo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)A highly miniaturized, single-chip, large scanning range MOEMS scanner is demonstrated. This intrinsically-aligned, monolithically integrated device uses small angular displacement to provide a linear scanning range of 2000 μm in the lateral and 1000 μm in the vertical direction, at a working distance of 2 cm, with an average operating power...conference paper 2018
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Iannacci, J. (author), Serra, E. (author), Sordo, G. (author), Bonaldi, M. (author), Borrielli, A. (author), Schmid, U. (author), Schneider, M.D. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this contribution, we discuss the implementation of a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within the technology platform available at the ISAS Institute (TU Vienna, Austria). The device, already presented by the authors, exploits the piezoelectric effect to convert environmental vibrations energy...journal article 2018
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Serra, E. (author), Morana, B. (author), Borrielli, Antonio (author), Marin, Francesco (author), Pandraud, G. (author), Pontin, Antonio (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author), Bonaldi, Michele (author)Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an...journal article 2018
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Pontin, A. (author), Bonaldi, M. (author), Borrielli, A. (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)According to quantum mechanics, if we keep observing a continuous variable we generally disturb its evolution. For a class of observables, however, it is possible to implement a so-called quantum nondemolition measurement: by confining the perturbation to the conjugate variable, the observable is estimated with arbitrary accuracy, or prepared...journal article 2018
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Pontin, A. (author), Bonaldi, M. (author), Borrielli, Antonio (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)Summary form only given. According to quantum mechanics, there exists a class of observables for which is possible to confine the perturbation produced by a continuous measurement to the conjugate variable. Therefore, it is possible to devise experimental schemes that allow estimating the observed variable with arbitrary accuracy, or preparing...abstract 2017
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Pandraud, G. (author), Milosavljevic, S. (author), Sammak, A. (author), Cherchi, Matteo (author), Jovic, A. (author), Sarro, Pasqualina M (author)In this work, we present the results of integrated Ge detectors grown on a Si photonic platform for sensing applications. The detectors are fabricated on a passive photonic circuit for maximum coupling efficiency. Measurement results at 1300 nm wavelength show a responsivity of 0.2 A/W and very low dark current levels. For a voltage range...conference paper 2017
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Thomas, S. (author), Jovic, A. (author), Morana, B. (author), Buja, F. (author), Gkouzou, A. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this paper we present the characterization of the coefficient of thermal expansion (CTE) of in-situ doped polycrystalline SiC thin films, obtained by low pressure chemical vapor deposition (LPCVD). The material is characterized using V-beam actuators on which the temperature coefficient of resistance (TCR) and the in-plane displacement...journal article 2016
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Serra, E. (author), Bawaj, M. (author), Borrielli, A. (author), Di Giuseppe, G. (author), Forte, S. (author), Kralj, N. (author), Malossi, N. (author), Marconi, L. (author), Marin, F. (author), Marino, F. (author), Morana, B. (author), Natali, R. (author), Pandraud, G. (author), Pontin, A. (author), Prodi, G.A. (author), Rossi, M. (author), Sarro, Pasqualina M (author), Vitali, D. (author), Bonaldi, M. (author)In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN<sub><i>x</i></sub> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN<sub><i>x</i></sub> membranes were fabricated and used as optomechanical resonators in a...journal article 2016
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)Sensing and stimulating microstructures are necessary to develop more specialized and highly accurate Organ-on-Chip (OOC) platforms. In this paper, we present the integration of a conductive polymer, poly (3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), on a stretchable membrane, core element of an Heart-on-Chip. The electrical...journal article 2016
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Tran, A.T. (author), Pandraud, G. (author), Tichelaar, F.D. (author), Nguyen, M.D. (author), Schellevis, H. (author), Sarro, P.M. (author)The structure of AlN layers grown on Ti with and without an AlN interlayer between the Si substrate and the Ti layer is investigated. The AlN grains take over the orientation of the Ti columnar grains in both cases. Surprisingly, the Ti grains do not take over completely the orientations of the AlN grains of the interlayer, and show the same...journal article 2013
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...journal article 2012
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Pandraud, G. (author), Margallo-Balbas, E. (author), Sarro, P.M. (author)We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO2-SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9 dB?cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in...journal article 2012
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Sarro, P.M. (author)Actuation enhancement for AlN piezoelectric cantilevers is achieved by coating slender AlN beams with a thin PECVD silicon nitride (SiN) layer. Very good linearity and high deflection, up to 19 nm/V of actuation deflection for 200 ?m long cantilevers, at quasi-static mode, is obtained for a 500 nm SiN top layer. This value is three times larger...journal article 2012
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for...journal article 2012
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