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Methods for optical modeling and cross-checking in ellipsometry and scatterometry
Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended Nijboer-Zernike theory
Through-focus phase retrieval and its connection to the spatial correlation for propagating fields
Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
Performance analysis of coherent optical scatterometry
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