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Hagendoorn, Y. (author), Pandraud, G. (author), Vollebregt, S. (author), Morana, B. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author)Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by...journal article 2022
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Jovic, A. (author), Losilla, Nuria Sanchez (author), Durá, Juan Sancho (author), Zinoviev, Kirill (author), Guivernau, Jose Luis Rubio (author), Margallo-Balbás, Eduardo (author), Mastrangeli, Massimo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45<sup>◦</sup> reflecting mirror that directs the light from the interferometer to the collimator....journal article 2020
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Sarro, Pasqualina M (author), Serra, E. (author)Cavity optomechanics has achieved the major breakthrough of the preparation and observation of macroscopic mechanical oscillators in non-classical states. The development of reliable indicators of the oscillator properties in these conditions is important also for applications to quantum technologies. We compare two procedures to infer the...journal article 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, Pasqualina M (author)Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...journal article 2019
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Jovic, A. (author), Pandraud, G. (author), Sanchez Losilla, Nuria (author), Sancho, Juan (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo Balbas, E (author), Sarro, Pasqualina M (author)In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW....journal article 2018
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Iannacci, J. (author), Serra, E. (author), Sordo, G. (author), Bonaldi, M. (author), Borrielli, A. (author), Schmid, U. (author), Schneider, M.D. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this contribution, we discuss the implementation of a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within the technology platform available at the ISAS Institute (TU Vienna, Austria). The device, already presented by the authors, exploits the piezoelectric effect to convert environmental vibrations energy...journal article 2018
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Serra, E. (author), Morana, B. (author), Borrielli, Antonio (author), Marin, Francesco (author), Pandraud, G. (author), Pontin, Antonio (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author), Bonaldi, Michele (author)Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an...journal article 2018
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Pontin, A. (author), Bonaldi, M. (author), Borrielli, A. (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)According to quantum mechanics, if we keep observing a continuous variable we generally disturb its evolution. For a class of observables, however, it is possible to implement a so-called quantum nondemolition measurement: by confining the perturbation to the conjugate variable, the observable is estimated with arbitrary accuracy, or prepared...journal article 2018
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Thomas, S. (author), Jovic, A. (author), Morana, B. (author), Buja, F. (author), Gkouzou, A. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this paper we present the characterization of the coefficient of thermal expansion (CTE) of in-situ doped polycrystalline SiC thin films, obtained by low pressure chemical vapor deposition (LPCVD). The material is characterized using V-beam actuators on which the temperature coefficient of resistance (TCR) and the in-plane displacement...journal article 2016
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Serra, E. (author), Bawaj, M. (author), Borrielli, A. (author), Di Giuseppe, G. (author), Forte, S. (author), Kralj, N. (author), Malossi, N. (author), Marconi, L. (author), Marin, F. (author), Marino, F. (author), Morana, B. (author), Natali, R. (author), Pandraud, G. (author), Pontin, A. (author), Prodi, G.A. (author), Rossi, M. (author), Sarro, Pasqualina M (author), Vitali, D. (author), Bonaldi, M. (author)In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN<sub><i>x</i></sub> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN<sub><i>x</i></sub> membranes were fabricated and used as optomechanical resonators in a...journal article 2016
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)Sensing and stimulating microstructures are necessary to develop more specialized and highly accurate Organ-on-Chip (OOC) platforms. In this paper, we present the integration of a conductive polymer, poly (3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), on a stretchable membrane, core element of an Heart-on-Chip. The electrical...journal article 2016
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Tran, A.T. (author), Pandraud, G. (author), Tichelaar, F.D. (author), Nguyen, M.D. (author), Schellevis, H. (author), Sarro, P.M. (author)The structure of AlN layers grown on Ti with and without an AlN interlayer between the Si substrate and the Ti layer is investigated. The AlN grains take over the orientation of the Ti columnar grains in both cases. Surprisingly, the Ti grains do not take over completely the orientations of the AlN grains of the interlayer, and show the same...journal article 2013
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...journal article 2012
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Pandraud, G. (author), Margallo-Balbas, E. (author), Sarro, P.M. (author)We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO2-SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9 dB?cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in...journal article 2012
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Sarro, P.M. (author)Actuation enhancement for AlN piezoelectric cantilevers is achieved by coating slender AlN beams with a thin PECVD silicon nitride (SiN) layer. Very good linearity and high deflection, up to 19 nm/V of actuation deflection for 200 ?m long cantilevers, at quasi-static mode, is obtained for a 500 nm SiN top layer. This value is three times larger...journal article 2012
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for...journal article 2012
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Alan, T. (author), Yokosawa, T. (author), Gaspar, J. (author), Pandraud, G. (author), Paul, O. (author), Creemer, F. (author), Sarro, P.M. (author), Zandbergen, H.W. (author)Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency of hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow to an electron-transparent chamber during TEM of reactions. Realistic experiments require very high...journal article 2012
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Alan, T. (author), Aravindh, V. (author), Wunnicke, O. (author), Sarro, P.M. (author)Very thin piezoelectric cantilevers based on AlN layers using titanium Ti thin film electrodes are fabricated and characterized. By optimizing the Ti sputtering parameters, a very low stress (156 MPa) layers stack with high crystallinity and strong (002) orientation of the AlN films is obtained. Finally, a simple fabrication process, fully CMOS...journal article 2011
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)A promising concept for a photonic crystal sensor for liquid sensing applications is introduced. The two dimensional photonic crystals are fabricated using a recently developed Atomic layer deposition ARrays Defined by Etch-back technique (AARDE) to obtain large functional surfaces and dense pillar arrays. Photonic signals are collected by means...journal article 2011
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Jardinier, E. (author), Pandraud, G. (author), Pham, M.H. (author), French, P.J. (author), Sarro, P.M. (author)A photonic crystal waveguide biosensor in the visible is presented for biosensing. The sensor is applied to Refractive Index (RI) measurements. The sensitivity at different wavelength is presented for both air holes and air core configurations of photonic crystal waveguide (PCW) made of TiO2. It is shown that by using Atomic Layer Deposition ...journal article 2009