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Apparatus and method for inspecting a surface of a sample
Apparatus and method for inspecting a surface of a sample
Integrated optical and charged particle inspection apparatus: Corrected version
Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
Railway infrastructure
Railway infrastructure
Methods and apparatus for imaging
Compensation-device for a magnetic field
Scanning transmission electron microscope
Apparatus for the generation of parallel beamlets
Micro x-ray source
Device with foil corrector for electron optical aberrations at low energy
Field emission photocathode array comprising an additional layer to improve the yield and electron optical imaging system using the same
Electron microscope
Lithography system
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