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Pezone, R. (author), Vollebregt, S. (author), Sarro, Pasqualina M (author), Unnikrishnan, S. (author)Control of the morphology of carbon nanotubes (CNT) is fundamental for many applications. It is known that the catalyst distributions influence the vertical alignment and the height of the CNT. In this work we investigate the influence of the pre-anneal time and reductant gases, specifically NH<sub>3</sub> and H<sub>2</sub> as well as...journal article 2020
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Sokolovskij, R. (author), Zhang, Jian (author), Zheng, Hongze (author), Li, Wenmao (author), Jiang, Yang (author), Yang, Gaiying (author), Yu, Hongyu (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)The present work reports on the hydrogen gas detection properties of Pt-AlGaN/GaN high electron mobility transistor (HEMT) sensors with recessed gate structure. Devices with gate recess depths from 5 to 15 nm were fabricated using a precision cyclic etching method, examined with AFM, STEM and EDS, and tested towards H2 response at high...journal article 2020
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Sun, J. (author), Hu, D. (author), Liu, Zewen (author), Middelburg, L.M. (author), Vollebregt, S. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied...journal article 2020
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Waafi, Affan K. (author), Gaio, N. (author), Quiros Solano, W.F. (author), Dijkstra, Paul (author), Sarro, Pasqualina M (author), Dekker, R. (author)We present the first Organ-on-Chip equipped with a low-impedance Poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) MicroElectrode Array (MEA). The novel device allows simultaneous mechanical stimulation with a stretchable PDMS membrane and electrical monitoring via the PEDOT:PSS MEA of multiple in vitro cell cultures. The...journal article 2020
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Jovic, A. (author), Losilla, Nuria Sanchez (author), Durá, Juan Sancho (author), Zinoviev, Kirill (author), Guivernau, Jose Luis Rubio (author), Margallo-Balbás, Eduardo (author), Mastrangeli, Massimo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45<sup>◦</sup> reflecting mirror that directs the light from the interferometer to the collimator....journal article 2020
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Sun, J. (author), Sokolovskij, R. (author), Iervolino, E. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)We developed an AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO<sub>3</sub>) nano-film modified gate for nitrogen dioxide (NO<sub>2</sub>) detection. The device has a suspended circular membrane structure and an integrated micro-heater. The thermal characteristic of the Platinum (Pt) micro-heater and the...journal article 2019
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Sun, J. (author), Zhan, Teng (author), Liu, Zewen (author), Wang, Junxi (author), Yi, Xiaoyan (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)This paper demonstrates a method to reduce the decay time in AlGaN/GaN photodetectors by a pulsed heating mode. A suspended AlGaN/GaN heterostructure photodetector integrated with a micro-heater is fabricated and characterized under ultraviolet illumination. We have observed that the course of persistent photoconductivity was effectively...journal article 2019
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Ricciardella, F. (author), Vollebregt, S. (author), Kurganova, Evgenia (author), Giesbers, A.J.M. (author), Ahmadi, M. (author), Sarro, Pasqualina M (author)A method to grow multi layers graphene (MLG) just by thermal annealing in an inert atmosphere is reported. A molybdenum (Mo) catalyst layer is used in combination with a solid amorphous carbon (a-C) source on top or below the Mo layer. The formation of MLG directly on top of the catalyst substrate surface is confirmed by Raman spectroscopy,...journal article 2019
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Sarro, Pasqualina M (author), Serra, E. (author)Cavity optomechanics has achieved the major breakthrough of the preparation and observation of macroscopic mechanical oscillators in non-classical states. The development of reliable indicators of the oscillator properties in these conditions is important also for applications to quantum technologies. We compare two procedures to infer the...journal article 2019
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Ricciardella, F. (author), Polichetti, Tiziana (author), Vollebregt, S. (author), Alfano, Brigida (author), Massera, Ettore (author), Sarro, Pasqualina M (author)Limitations such as lack of detected stationary signal and slow signal recovery after detection currently affect graphene-based chemi-sensors operating at room temperature. In this work, we model the behavior of a sensor in a test chamber having limited volume and simulating the environmental conditions. From this model, we mathematically derive...journal article 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, Pasqualina M (author)Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...journal article 2019
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Oliveira Rodrigues, F.J. (author), Ribeiro, J.F. (author), Anacleto, P.A. (author), Fouchard, A. (author), David, O. (author), Sarro, Pasqualina M (author), Mendez, P.M. (author)OBJECTIVE: As electrodes are required to interact with sub-millimeter neural structures, innovative microfabrication processes are required to enable fabrication of microdevices involved in such stimulation and/or recording. This requires the development of highly integrated and miniaturized systems, comprising die-integration-compatible...journal article 2019
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Sun, J. (author), Zhan, Teng (author), Liu, Zewen (author), Wang, Junxi (author), Yi, Xiaoyan (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A suspended WO<sub>3</sub>-gate AlGaN/GaN heterostructure photodetector integrated with a micro-heater is micro-fabricated and characterized for ultraviolet photo detection. The transient optical characteristics of the photodetector at different temperatures are studied. The 2DEG-based photodetector shows a recovery (170 s) time under 240 nm...journal article 2019
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Sun, J. (author), Sokolovskij, R. (author), Iervolino, E. (author), Santagata, F. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A suspended AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO 3 ) nanofilm modified gate was microfabricated and characterized for ppm-level acetone gas detection. The sensor featured a suspended circular membrane structure and an integrated microheater to select the optimum working temperature. High working...journal article 2019
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Prodanovic, V. (author), Chan, H.W. (author), van der Graaf, H. (author), Sarro, Pasqualina M (author)In this paper we demonstrate the fabrication of large arrays of ultrathin freestanding membranes (tynodes) for application in a timed photon counter (TiPC), a novel photomultiplier for single electron detection. Low pressure chemical vapour deposited silicon nitride (Si <sub>x</sub> N <sub>y</sub> ) and atomic layer deposited alumina (Al<sub...journal article 2018
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Jovic, A. (author), Pandraud, G. (author), Sanchez Losilla, Nuria (author), Sancho, Juan (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo Balbas, E (author), Sarro, Pasqualina M (author)In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW....journal article 2018
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Silvestri, C. (author), Riccio, Michele (author), Poelma, René H. (author), Jovic, A. (author), Morana, B. (author), Vollebregt, S. (author), Irace, Andrea (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)The high aspect ratio and the porous nature of spatially oriented forest-like carbon nanotube (CNT) structures represent a unique opportunity to engineer a novel class of nanoscale assemblies. By combining CNTs and conformal coatings, a 3D lightweight scaffold with tailored behavior can be achieved. The effect of nanoscale coatings, aluminum...journal article 2018
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Prodanovic, V. (author), Chan, H.W. (author), Mane, Anil U. (author), Elam, Jeffrey W. (author), Minjauw, Matthias M. (author), Detavernier, Christophe (author), van der Graaf, H. (author), Sarro, Pasqualina M (author)This study reports on the secondary electron emission (SEE) performance of atomic layer deposited MgO films, with thicknesses in the range from 5 to 25 nm, for the application in the Timed Photon Counter. In this novel, photodetector MgO is utilized as a material for the fabrication of ultrathin transmission dynodes (tynodes). Two different...journal article 2018
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Iannacci, J. (author), Serra, E. (author), Sordo, G. (author), Bonaldi, M. (author), Borrielli, A. (author), Schmid, U. (author), Schneider, M.D. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this contribution, we discuss the implementation of a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within the technology platform available at the ISAS Institute (TU Vienna, Austria). The device, already presented by the authors, exploits the piezoelectric effect to convert environmental vibrations energy...journal article 2018
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Santagata, F. (author), Sun, J. (author), Iervolino, E. (author), Yu, H. (author), Wang, F. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author), Zhang, Guoyi (author)Purpose: The purpose of this paper is to demonstrate a novel 3D system-in-package (SiP) approach. This new packaging approach is based on stacked silicon submount technology. As demonstrators, a smart lighting module and a sensor systems were successfully developed by using the fabrication and assembly process described in this paper. Design...journal article 2018