Pages
- 1
- 2
- document
-
Hagendoorn, Y. (author), Pandraud, G. (author), Vollebregt, S. (author), Morana, B. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author)Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by...journal article 2022
- document
-
Jovic, A. (author), Losilla, Nuria Sanchez (author), Durá, Juan Sancho (author), Zinoviev, Kirill (author), Guivernau, Jose Luis Rubio (author), Margallo-Balbás, Eduardo (author), Mastrangeli, Massimo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45<sup>◦</sup> reflecting mirror that directs the light from the interferometer to the collimator....journal article 2020
- document
-
Xin, Yu (author), Pandraud, G. (author), French, P.J. (author)In this Letter, a slope transfer method to fabricate vertical waveguide couplers is proposed. This method utilises wet etched Si as a mask, and takes advantage of dry etching selectivity between Si and SiC, to successfully transfer the profile from the Si master into SiC. By adopting this method, a <2° slope is achieved. Such a taper can...journal article 2019
- document
-
Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Sarro, Pasqualina M (author), Serra, E. (author)Cavity optomechanics has achieved the major breakthrough of the preparation and observation of macroscopic mechanical oscillators in non-classical states. The development of reliable indicators of the oscillator properties in these conditions is important also for applications to quantum technologies. We compare two procedures to infer the...journal article 2019
- document
-
Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, Pasqualina M (author)Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...journal article 2019
- document
-
Xin, Y. (author), Pandraud, G. (author), Zhang, Y. (author), French, P.J. (author)In this paper, we propose a novel vertical SU-8 waveguide for evanescent analyte sensing. The waveguide is designed to possess a vertical and narrow structure to generate evanescent waves on both sides of the waveguide's surface, aimed at increasing the sensitivity by enlarging the sensing areas. We performed simulations to monitor the...journal article 2019
- document
-
Kluba, M.M. (author), Morana, B. (author), Savov, A.M. (author), van Zeijl, H.W. (author), Pandraud, G. (author), Dekker, R. (author)We present a novel, wafer-based fabrication process that enables integration and assembly of electronic components, such as ASICs and decoupling capacitors, with flexible interconnects. The electronic components are fabricated in, or placed on precisely defined and closely-spaced silicon islands that are connected by interconnects embedded in...journal article 2018
- document
-
Pontin, A. (author), Bonaldi, M. (author), Borrielli, A. (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)According to quantum mechanics, if we keep observing a continuous variable we generally disturb its evolution. For a class of observables, however, it is possible to implement a so-called quantum nondemolition measurement: by confining the perturbation to the conjugate variable, the observable is estimated with arbitrary accuracy, or prepared...journal article 2018
- document
-
Jovic, A. (author), Pandraud, G. (author), Sanchez Losilla, Nuria (author), Sancho, Juan (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo Balbas, E (author), Sarro, Pasqualina M (author)In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW....journal article 2018
- document
-
Iannacci, J. (author), Serra, E. (author), Sordo, G. (author), Bonaldi, M. (author), Borrielli, A. (author), Schmid, U. (author), Schneider, M.D. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this contribution, we discuss the implementation of a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within the technology platform available at the ISAS Institute (TU Vienna, Austria). The device, already presented by the authors, exploits the piezoelectric effect to convert environmental vibrations energy...journal article 2018
- document
-
Serra, E. (author), Morana, B. (author), Borrielli, Antonio (author), Marin, Francesco (author), Pandraud, G. (author), Pontin, Antonio (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author), Bonaldi, Michele (author)Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an...journal article 2018
- document
-
Rossi, Massimiliano (author), Kralj, Nenad (author), Zippilli, Stefano (author), Natali, Riccardo (author), Borrielli, Antonio (author), Pandraud, G. (author), Serra, E. (author), Di Giuseppe, Giovanni (author), Vitali, David (author)Normal-mode splitting is the most evident signature of strong coupling between two interacting subsystems. It occurs when two subsystems exchange energy between themselves faster than they dissipate it to the environment. Here we experimentally show that a weakly coupled optomechanical system at room temperature can manifest normal-mode...journal article 2018
- document
-
Neklyudova, M. (author), Erdamar, A.K. (author), Vicarelli, L. (author), Heerema, S.J. (author), Rehfeldt, T. (author), Pandraud, G. (author), Koladouz Esfahani, Z. (author), Dekker, C. (author), Zandbergen, H.W. (author)We present a technique to fabricate ultrathin (down to 20 nm) uniform electron transparent windows at dedicated locations in a SiN membrane for in situ transmission electron microscopy experiments. An electron-beam (e-beam) resist is spray-coated on the backside of the membrane in a KOH-etched cavity in silicon which is patterned using...journal article 2017
- document
-
Rossi, Massimiliano (author), Kralj, Nenad (author), Zippilli, Stefano (author), Natali, Riccardo (author), Borrielli, Antonio (author), Pandraud, G. (author), Serra, E. (author), Di Giuseppe, Giovanni (author), Vitali, David (author)We realize a phase-sensitive closed-loop control scheme to engineer the fluctuations of the pump field which drives an optomechanical system and show that the corresponding cooling dynamics can be significantly improved. In particular, operating in the counterintuitive "antisquashing" regime of positive feedback and increased field...journal article 2017
- document
-
Thomas, S. (author), Jovic, A. (author), Morana, B. (author), Buja, F. (author), Gkouzou, A. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this paper we present the characterization of the coefficient of thermal expansion (CTE) of in-situ doped polycrystalline SiC thin films, obtained by low pressure chemical vapor deposition (LPCVD). The material is characterized using V-beam actuators on which the temperature coefficient of resistance (TCR) and the in-plane displacement...journal article 2016
- document
-
Serra, E. (author), Bawaj, M. (author), Borrielli, A. (author), Di Giuseppe, G. (author), Forte, S. (author), Kralj, N. (author), Malossi, N. (author), Marconi, L. (author), Marin, F. (author), Marino, F. (author), Morana, B. (author), Natali, R. (author), Pandraud, G. (author), Pontin, A. (author), Prodi, G.A. (author), Rossi, M. (author), Sarro, Pasqualina M (author), Vitali, D. (author), Bonaldi, M. (author)In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN<sub><i>x</i></sub> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN<sub><i>x</i></sub> membranes were fabricated and used as optomechanical resonators in a...journal article 2016
- document
-
Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)Sensing and stimulating microstructures are necessary to develop more specialized and highly accurate Organ-on-Chip (OOC) platforms. In this paper, we present the integration of a conductive polymer, poly (3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), on a stretchable membrane, core element of an Heart-on-Chip. The electrical...journal article 2016
- document
-
Borrielli, A. (author), Pontin, A. (author), Cataliotti, F.S. (author), Marconi, L. (author), Marin, F. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Serra, E. (author), Bonaldi, M. (author)We present an oscillating micromirror with mechanical quality factors Q up to 1.2×106 at cryogenic temperature and optical losses lower than 20 ppm. The device is specifically designed to ease the detection of ponderomotive squeezing (or, more generally, to produce a cavity quantum optomechanical system) at frequencies of about 100 kHz. The...journal article 2015
- document
-
Tran, A.T. (author), Pandraud, G. (author), Tichelaar, F.D. (author), Nguyen, M.D. (author), Schellevis, H. (author), Sarro, P.M. (author)The structure of AlN layers grown on Ti with and without an AlN interlayer between the Si substrate and the Ti layer is investigated. The AlN grains take over the orientation of the Ti columnar grains in both cases. Surprisingly, the Ti grains do not take over completely the orientations of the AlN grains of the interlayer, and show the same...journal article 2013
- document
-
Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...journal article 2012
Pages
- 1
- 2