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Yan, B. (author), Pham, H.T.M. (author), Ma, Y. (author), Zhuang, Y. (author), Sarro, P.M. (author)The authors demonstrate a method for the fabrication of in situ ultrathin porous anodic aluminum oxide layers (aspect ratio<2:1) on Si, which can be directly used as templates for nanodot preparation and for pattern transfer. The regular shape of the aluminum oxide pores is maintained even when the thickness of the aluminum oxide template is...journal article 2007
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Henneken, V.A. (author), Sassen, W.P. (author), Van der Vlist, W. (author), Wien, W.H.A. (author), Tichem, M. (author), Sarro, P.M. (author)In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioning device combined with a clamping structure for positioning and constraining an optical fiber. The fiber position can be controlled in the two directions perpendicular to the fiber axis using two specifically designed wedges that can be accurately...journal article 2008
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- Sonsky, J. (author), Huizenga, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author) journal article 2000
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Kasi, D.G. (author), de Graaf, M.N.S. (author), Motreuil-Ragot, P.A. (author), Frimat, Jean-Phillipe M. S. (author), Ferrari, Michel D. (author), Sarro, Pasqualina M (author), Mastrangeli, Massimo (author), van den Maagdenberg, Arn M.J.M. (author), Mummery, Christine (author), Orlova, Valeria (author)Organ-on-a-chip (OoC) and microfluidic devices are conventionally produced using microfabrication procedures that require cleanrooms, silicon wafers, and photomasks. The prototyping stage often requires multiple iterations of design steps. A simplified prototyping process could therefore offer major advantages. Here, we describe a rapid and...journal article 2022
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Hagendoorn, Y. (author), Pandraud, G. (author), Vollebregt, S. (author), Morana, B. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author)Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by...journal article 2022
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Sokolovskij, R. (author), Zhang, Jian (author), Zheng, Hongze (author), Li, Wenmao (author), Jiang, Y. (author), Yang, Gaiying (author), Yu, H. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)The present work reports on the hydrogen gas detection properties of Pt-AlGaN/GaN high electron mobility transistor (HEMT) sensors with recessed gate structure. Devices with gate recess depths from 5 to 15 nm were fabricated using a precision cyclic etching method, examined with AFM, STEM and EDS, and tested towards H 2 response at high...journal article 2020
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Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)The wide bandgap of silicon carbide (SiC) has attracted a large interest over the past years in many research fields, such as power electronics, high operation temperature circuits, harsh environmental sensing, and more. To facilitate research on complex integrated SiC circuits, ensure reproducibility, and cut down cost, the availability of a...journal article 2022
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Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Leijtens, Johan (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are...journal article 2022
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Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Sarro, Pasqualina M (author), Duesberg, Georg S. (author)Humidity sensing is fundamental in some applications, as humidity can be a strong interferent in the detection of analytes under environmental conditions. Ideally, materials sensitive or insensitive towards humidity are strongly needed for the sensors used in the first or second case, respectively. We present here the sensing properties of...journal article 2020
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Sun, J. (author), Zhan, Teng (author), Sokolovskij, R. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)Based on our proposed precision two-step gate recess technique, a suspended gate-recessed Pt/AlGaN/GaN heterostructure gas sensor integrated with a micro-heater is fabricated and characterized. The controllable two-step gate recess etching method, which includes O2 plasma oxidation of nitride and wet etching, improves gas sensing performance....journal article 2021
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Visser, Sten (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)This paper describes the microfabrication and electrical characterization of aluminum-coated superconducting through-silicon vias (TSVs) with sharp superconducting transition above 1 K. The sharp superconducting transition was achieved by means of fully conformal and void-free DC-sputtering of the TSVs with Al, and is here demonstrated in up...journal article 2021
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Chan, H.W. (author), Prodanovic, V. (author), Theulings, A.M.M.G. (author), Hagen, C.W. (author), Sarro, Pasqualina M (author), v.d. Graaf, H. (author)The (secondary) electron emission from multilayered Al2O3/TiN membranes has been investigated with a hemispherical collector system in a scanning electron microscope for electrons with energies between 0.3 and 10 keV. These ultra-thin membranes are designed to function as transmission dynodes in novel vacuum electron multipliers. Two...journal article 2021
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Syed, W.H. (author), Fiorentino, G. (author), Cavallo, D. (author), Spirito, M. (author), Sarro, Pasqualina M (author), Neto, A. (author)In this paper, we demonstrate, at 300 GHz and with integrated technology, the effectiveness of artificial dielectric layers to enhance the front-to-back ratio of printed antennas. This concept was previously proposed at microwave frequencies and using printed circuit board technology. The artificial material is now realized by introducing non...journal article 2015
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Prodanovic, V. (author), Chan, H.W. (author), van der Graaf, H. (author), Sarro, Pasqualina M (author)In this paper we demonstrate the fabrication of large arrays of ultrathin freestanding membranes (tynodes) for application in a timed photon counter (TiPC), a novel photomultiplier for single electron detection. Low pressure chemical vapour deposited silicon nitride (Si <sub>x</sub> N <sub>y</sub> ) and atomic layer deposited alumina (Al<sub...journal article 2018
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Borrielli, A. (author), Bonaldi, M. (author), Serra, E. (author), Sarro, Pasqualina M (author), Morana, B. (author)Feedback-based control techniques are useful tools in precision measurements as they allow us to actively shape the mechanical response of high quality factor oscillators used in force detection measurements. In this paper, we implement a feedback technique on a high-stress low-loss SiN membrane resonator, exploiting the charges trapped on...journal article 2021
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Hong, H. (author), Wei, Jiangtao (author), Lei, Xin (author), Chen, Haiyun (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author), Liu, Zewen (author)Correction to: Microsystems & Nanoengineering published online 16 May 2023 Correction Following publication of the original article<sup>1</sup>, it was noticed that the phrase ‘DNA sequencing’ is incorrect, which should be replaced by ‘biosensing’. The original paper has been updated.journal article 2023
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Sun, J. (author), Zhan, Teng (author), Liu, Zewen (author), Wang, Junxi (author), Yi, Xiaoyan (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)This paper demonstrates a method to reduce the decay time in AlGaN/GaN photodetectors by a pulsed heating mode. A suspended AlGaN/GaN heterostructure photodetector integrated with a micro-heater is fabricated and characterized under ultraviolet illumination. We have observed that the course of persistent photoconductivity was effectively...journal article 2019
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Vezio, P. (author), Chowdhury, A. (author), Bonaldi, M. (author), Borrielli, Antonio (author), Marino, F. (author), Morana, B. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)We experimentally investigate a mechanical squeezed state realized in a parametrically modulated membrane resonator embedded in an optical cavity. We demonstrate that a quantum characteristic of the squeezed dynamics can be revealed and quantified even in a moderately warm oscillator, through the analysis of motional sidebands. We provide a...journal article 2020
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Serra, E. (author), Borrielli, Antonio (author), Marin, Francesco (author), Marino, Francesco (author), Malossi, Nicola (author), Morana, B. (author), Piergentili, Paolo (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author)Micro- and nanomechanical resonators play a prominent part in many sensing and signal processing platforms due to their capability to pervasively couple with a wide variety of physical systems. Particularly relevant is their embedding in advanced optomechanical setups, which has recently pioneered optically cooled mechanical oscillators...journal article 2021
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Romijn, J. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author), Vollebregt, S. (author)The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are...journal article 2021