Electrostatic Lens System Design and Optimization Using Evolutionary Algorithms

Cleanroom in an SEM

High Speed Electron Microscopy: Engineering of a commercial multi-beam scanning electron microscope with transmission imaging

Controlled nano-patterning using focused electron beam induced deposition

Development and application of ultrafast scanning electron microscopy

Physics and applications of electron-matter interaction simulations

Creation of electron pulses with a laser-triggered micro fabricated electron beam deflector

Simulation of Electron-Matter Interaction in Electron Beam Lithography and Metrology

Electron wave front modulation with patterned mirrors

Electron beam technology for single nanometer fabrication

High resolution resist-free lithography in the SEM

Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

The Nano-Aperture Ion Source

Individual beam control in multi electron beam systems

Quantum Noise Effects in e-Beam Lithography and Metrology

Development of the Nano-Aperture Ion Source (NAIS)

Simultaneous Correlative Light and Electron Microscopy of Samples in Liquid

Cathodoluminescence Microscopy of Nanostructures on Transparent Substrates

Brightness limitations in sources for static and ultra-fast high resolution electron microscopy

196 Beams in a Scanning Electron Microscope