Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis

Optimization of silicon-rich silicon nitride films for electron multiplication in timed photon counters

Artificial Dielectric Layer Based on PECVD Silicon Carbide for Terahertz Sensing Applications

A hybrid silicon-PDMS optofluidic platform for sensing applications

Optofluidics: A new tool for sensing

The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Analyzing Protein Denaturation using Fast Differential Scanning Calorimetry

Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides

Single-Mask Fabrication of Temperature Triggered MEMS Switch for Cooling Control in SSL System

Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating

Reflectance-based two-dimensional TiO2 photonic crystal liquid sensors

A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring

Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure

Optofluidics: Waveguides and devices

Integrated MEMS: Opportunities & Challenges

Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations

Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Reflectance-based Photonic Crystal Liquid Sensors Made of ALD TiO2