Piezoelectric nanopositioning systems exhibit low damping and resonance modes that are highly sensitive to loading conditions, resulting in performance degradation under payload variations. Conventional damping and robust control methods typically address these challenges separately, overlooking the coupling between damping and tracking dynamics as well as the influence of higher-order resonant modes. This paper proposes a dual-loop control framework that integrates active damping with mixed-sensitivity H∞ synthesis to achieve robust reference tracking and disturbance rejection under large resonance frequency variations. A Non-Minimum-Phase Resonant Controller (NRC) is implemented in the inner loop to suppress the dominant resonance and reduce system uncertainty. Generalized plant formulation and systematic weighting design guidelines of arbitrary order are developed to explicitly incorporate higher-order modes in the outer-loop H∞ synthesis. The proposed approach is validated through simulations and experiments on an industrial piezoelectric nanopositioning system, demonstrating improved robustness and precision across the full payload range.

Elastic piezoelectric metastructures with actively implemented resonators offer an opportunity for novel vibration attenuation solutions, thanks to the possibility of creating bandgaps at low frequencies, their tuneability and compactness. We focus on metastructures with sensors and actuators, where the resonators are implemented using feedback control techniques, an alternative to commonly used shunt circuits. For bandgap creation in finite structures, unit-cell-based dispersion analysis is unsuitable since it lacks information on modal behaviour. As an alternative, a modal analysis approach can be used to calculate the frequency range of a locally resonant bandgap in closed form using the assumption of an infinite number of transducers of infinitesimal length distributed along the structure. The predictions obtained using this approach are accurate if a sufficiently high number of transducers is used, and the number required increases with the increasing target frequency. Despite the recent developments in the field, it remains to be seen what the sufficient number is in a specific situation. In this paper, we show that for low-frequency bandgaps in cantilevers, the minimal number of transducers is equal to the number of the dominant vibration mode at the targeted range of frequencies. Increasing the number of transducers above this value increases the vibration attenuation in the bandgap region but does not result in its widening. The result is demonstrated using numerical analysis.

Nanopositioning systems frequently encounter limitations in control bandwidth due to their lightly damped resonance behavior. This paper presents a novel Non-Minimum-Phase Resonant Controller (NRC) aimed at active damping control within dual closed-loop architectures, specifically applied to piezo-actuated nanopositioning systems. The control strategy is structured around formulated objectives for shaping sensitivity functions to meet predetermined system performance criteria. Leveraging non-minimum-phase characteristics, the proposed NRC accomplishes complete damping and the bifurcation of double resonant poles at the primary resonance peak through a constant-gain design accompanied by tunable phase variation. The NRC demonstrates robustness against frequency variations of the resonance arising from load changes and is also capable of damping higher-order flexural modes simultaneously. Furthermore, by establishing high gains at low frequencies within the inner closed-loop and integrating it with a conventional PI tracking controller, the NRC achieves substantial dual closed-loop bandwidths that can exceed the first resonance frequency. Moreover, the NRC significantly diminishes the effect of low-frequency reference signals on real feedback errors while effectively rejecting disturbances proximate to the resonance frequency. All contributions are thoroughly formulated and exemplified mathematically, with the controller's performance confirmed through an experimental setup utilizing an industrial nanopositioning system. The experimental results indicate dual closed-loop bandwidths of 830 Hz and 755 Hz, characterized by $\pm3$ dB and $\pm1$ dB bounds, respectively, that surpass the resonance frequency of 710 Hz.

This article introduces output prediction methods for two types of systems containing sinusoidal-input uniformly convergent (SIUC) elements. The first method considers these elements in combination with single-input single-output linear time-invariant (LTI) systems before, after, and in parallel to them. The second method considers a multiple-input multiple-output LTI system where each input is controlled by an SIUC element. The output prediction only requires frequency-response functions of the LTI elements and is fully accurate for sinusoidal inputs.

In precision positioning systems, lightly damped higher-order resonance modes can induce undesirable vibrations that degrade system performance and accuracy. These resonances pose additional challenges in non-collocated dual-stage positioning systems, where they significantly limit control bandwidth. Although conventional notch filters are commonly used alongside tracking controllers to enhance bandwidth, they lack robustness when faced with system parameter uncertainties. Moreover, the effects of the delimiting resonance on disturbance rejection remain. Active damping control has been successfully used to mitigate issues related to the primary resonance mode, but its application to higher-order modes has not been explored. This paper introduces a novel control strategy, High-Pass Positive Position Feedback (HP-PPF), inspired by existing methods but designed specifically for active damping of higher-order, non-collocated modes in positioning systems. The proposed method incorporates a second-order high-pass filter within a positive feedback loop, effectively attenuating the delimiting resonance. Integrated with a PID tracking controller in a dual-loop configuration, this method enhances disturbance rejection and robustness against model uncertainties, overcoming limitations of traditional notch filter-based methods while achieving comparable bandwidth improvements. The proposed control architecture is validated through a proof-of-concept experimental setup that demonstrates the effectiveness of the underlying mathematical framework.

Contactless handling systems for substrates hold significant potential in enhancing chip manufacturing yields by allowing the use of thinner and larger substrates, eliminating the risks associated with physical contact. This article introduces a novel contactless force actuator, employing the active air-bearing working principle, designed with a compact structure to effectively actuate substrates. The actuator features a continuous deformable air-bearing surface composed of compliant-based actuation unit cells, ensuring ease of fabrication to meet tight air-bearing tolerances. A modular design with seven unit cells is designed and manufactured to validate the performance. The results confirm that the proposed contactless actuator can be used to levitate and actuate the substrate simultaneously, in which case the maximum actuation force in the x -axis is determined to be 90 mN and a 42.5- μ m fly height in the z -axis is achieved.

Piezoelectric nanopositioning systems, typically guided by flexure mechanisms, are limited to low closed-loop bandwidths due to their lightly damped resonance behavior. Active damping controllers (ADCs) have been widely employed to suppress the dominant first mode and enable higher bandwidths; however, their performance is severely degraded in the presence of delay, while significant higher-order modes often remain unaddressed, further restricting precision. This paper proposes a simple loop-shaping methodology that incorporates a non-minimum-phase (NMP) filter in series with a linear damping controller to restore sufficient phase margins at open-loop crossover frequencies, thereby mitigating delay-induced degradation in closed-loop damping performance. The methodology is further extended to a parallel damping control structure that enables simultaneous suppression of both the first dominant and higher-order modes. Experimental validation on a piezoelectric nanopositioner demonstrates the effectiveness of the proposed strategy, achieving up to 25.5 dB attenuation of higher-order resonances under significant delay. In conjunction with a standard proportional–integral (PI) motion controller and a non-minimum-phase resonant controller (NRC) targeting the first mode, the overall control architecture extends the closed-loop bandwidth to 435 Hz, surpassing the system’s first resonance frequency, without compromising low-frequency dynamics.

This article introduces an output prediction method for a general class of closed-loop reset control systems. The considered type of system consists of a linear time-invariant (LTI) part which is connected in feedback with a reset controller that (partially) resets (a part of) its states when its input is equal to zero. Given some practical assumptions on the reset element’s input signal, the system output can be accurately predicted when the system is subject to a sinusoidal input. One benefit of this approach is that it provides an intuitive frequency-domain representation of the system. Another benefit is that output prediction can be done based solely on a frequency-response function (FRF) of the LTI part of the system. This article also introduces an accurate and computationally efficient algorithm which can – based on the predicted output – compute a closed-loop pseudo-sensitivity. This pseudo-sensitivity represents the ratio between the maximum absolute value of the system’s output and the amplitude of its input, similar to the closed-loop sensitivity functions for LTI systems.

This paper explores the use of reset control in systems subjected to wide-band disturbances. Such excitation may result in too rare or excessive resetting, leading to deteriorated performance. Moreover, the commonly used Describing Function (DF) approximation for the frequency-domain design of reset systems does not sufficiently represent the reset element’s behavior under such conditions as it is defined for sinusoidal excitation. To address this, we present a design approach based on analyzing the power spectral densities (PSD) of the signals in the system and using the Best Linear Approximations (BLA) of reset elements. In the first step, the dominant components in the PSD of the reset triggering signal are related to the frequency domain properties of the reset element. To benefit from resetting, it should lead to an increase in phase margins near the cross-over frequency. This is the case where the components at the cross-over frequency dominate the reset triggering signal. To ensure this, the use of a bandpass shaping filter is proposed. In the second step, the BLA of the reset element is used to represent its response to the signal with a specific PSD in the frequency domain. This information is used to tune both the reset element and the shaping filter to achieve the desired performance and minimize loss of gain at low frequencies. Closed-loop simulations show the method’s feasibility in achieving the desired behavior of the reset element, leading to improved resonance peak damping in the example studied.

In this note, we present an extension of the nonlinear negative imaginary (NI) systems theory to reset systems. We define the reset negative imaginary (RNI) and reset strictly negative imaginary (RSNI) systems and provide a state-space characterization of these systems in terms of linear matrix inequalities. Subsequently, we establish the conditions for the internal stability of a positive feedback interconnection of a (strictly) negative imaginary linear time-invariant plant and a reset (strictly) negative imaginary controller. The applicability of the proposed method is demonstrated in a numerical example of a reset version of a positive position feedback (PPF) controller for a plant with resonance.

This study presents a shaped reset feedback control strategy to enhance the performance of precision motion systems. The approach utilizes a phase-lead compensator as a shaping filter to tune the phase of reset instants, thereby shaping the nonlinearity in the first-order reset control. The design achieves either an increased phase margin while maintaining gain properties or improved gain without sacrificing phase margin, compared to reset control without the shaping filter. Then, frequency-domain design procedures are provided for both Clegg Integrator (CI)-based and First-Order Reset Element (FORE)-based reset control systems. Finally, the effectiveness of the proposed strategy is demonstrated through two experimental case studies on a precision motion stage. In the first case, the shaped reset control leverages phase-lead benefits to achieve zero overshoot in the transient response. In the second case, the shaped reset control strategy enhances the gain advantages of the previous reset element, resulting in improved steady-state performance, including better tracking precision and disturbance rejection, while reducing overshoot for an improved transient response.

In nanopositioning systems, the control bandwidth is frequently limited due to the presence of lightly damped resonant dynamics. Active Damping Control is typically integrated with tracking control within an inner-loop configuration to mitigate dominant resonant dynamics and enable higher bandwidths. The paper discusses that, in such architectures, feedforward control based on plant dynamics inversion is insufficient to achieve the intended feedforward objectives. In response to this limitation, the study introduces a delay-based input shaping and feedforward framework combined with a dual closed-loop feedback control system that includes active damping. The feedforward filter, derived from partial inner closed-loop dynamics inversion, facilitates precise, delayed tracking of reference signals. This configuration implements a unity-gain shaping filter, effectively reducing tracking feedback errors caused by reference inputs. Furthermore, the study presents a simulated example employing a simplified dynamic model of an industrial nanopositioning system to demonstrate enhancements in closed-loop periodic tracking performance through the proposed feedforward and input-shaping methodology.

Reset control enhances the performance of high-precision mechatronics systems. This paper introduces a generalized reset feedback control structure that integrates a single reset-state reset controller, a shaping filter for tuning reset actions, and linear compensators arranged in series and parallel configurations with the reset controller. This structure offers greater tuning flexibility to optimize reset control performance. However, frequency-domain analysis for such systems remains underdeveloped. To address this gap, this study makes three key contributions: (1) developing Higher-Order Sinusoidal Input Describing Functions (HOSIDFs) for open-loop reset control systems; (2) deriving HOSIDFs for closed-loop reset control systems and establishing a connection with open-loop analysis; and (3) creating a MATLAB-based App to implement these methods, providing mechatronics engineers with a practical tool for reset control system design and analysis. The accuracy of the proposed methods is validated through simulations and experiments. Finally, the utility of the proposed methods is demonstrated through case studies that analyze and compare the performance of three controllers: a PID controller, a reset controller, and a shaped reset controller on a precision motion stage. Both analytical and experimental results demonstrate that the shaped reset controller provides higher tracking precision while reducing actuation forces, outperforming both the reset and PID controllers. These findings highlight the effectiveness of the proposed frequency-domain methods in analyzing and optimizing the performance of reset-controlled mechatronics systems.

This work proposes a novel nonlinear Proportional-Integral (PI) controller, which utilizes a generalized first-order reset element. The proposed element can achieve similar magnitude-characteristics as its linear counterpart but with less phase lag at the open-loop crossover frequency (i.e. the control bandwidth), according to a sinusoidal-input describing function (SIDF) analysis. The same can be achieved with an existing reset-based integrator, the Clegg integrator (CI). However, it is known that a Proportional-CI (PCI) element can excessively generate higher-order harmonics of its input, which are neglected in the SIDF-analysis. Furthermore, a PCI can cause a limit cycle when placed in closed-loop with certain types of plants. The novel PI controller proposed in this work can prevent the limit cycle and can reduce the generation of higher-order harmonics, while retaining the beneficial phase advantage that is associated with existing reset-based PI controllers.

The frequency response analysis describes the steady-state responses of a system to sinusoidal inputs at different frequencies, providing control engineers with an effective tool for designing control systems in the frequency domain. However, conducting this analysis for closed-loop reset systems is challenging due to system nonlinearity. This paper addresses this challenge through two key contributions. First, it introduces novel analysis methods for both open-loop and closed-loop reset control systems at steady states. These methods decompose the frequency responses of reset systems into base-linear and nonlinear components. Second, building upon this analysis, the paper develops closed-loop higher-order sinusoidal-input describing functions for reset control systems at steady states. These functions facilitate the analysis of frequency-domain properties, establish a connection between open-loop and closed-loop analysis. The accuracy and effectiveness of the proposed methods are successfully validated through simulations and experiments conducted on a reset Proportional–Integral–Derivative (PID) controlled precision motion system.

When a linear controller is replaced by a reset controller, it is possible to keep the gain behaviour essentially the same, while improving the phase behaviour. However, because reset control is nonlinear, higher order harmonics appear, which may deteriorate the results. In this paper, reset controllers are combined with fractional derivatives, decreasing the magnitude of higher order harmonics. In this way, better results are found in simulations of a Clegg integrator, of a FORE (first order reset element), and of a CgLp (constant in gain lead in phase) controller. The reason why better results are found is explained.

This study explores the optimization of bandgap characteristics in locally resonant metastructures through advanced artificial intelligence (AI) and optimization algorithms, focusing on the accurate estimation of resonator damping ratios. By developing a novel mathematical framework for metastructure analysis, this research diverges from traditional methods, offering a more nuanced approach to bandgap manipulation. This research significantly improves metastructure modeling accuracy by precisely estimating resonator and structural damping ratios, enhancing model fidelity crucial for analysis, control strategies, and design optimization. Through a combination of model simulations and experimental validation, the efficacy of the Hybrid Genetic Algorithm-Particle Swarm Optimization (GA-PSO) algorithm is demonstrated, highlighting its potential for practical applications in engineering metastructures. This paper not only provides a robust method for estimating damping ratios but also opens new avenues for future research, including the application of machine learning techniques and the development of intelligent materials. The findings of this study contribute to the foundational understanding necessary for the advancement of mathematical modeling metamaterials, with broad implications for industries where precise vibration control is crucial.

Incorporating actively implemented resonators within elastic piezoelectric metastructures presents a unique approach for vibration attenuation, enabling the creation of tuneable low-frequency bandgaps. Through feedback control, we enhance the compactness of these metastructures by integrating resonator dynamics internally. We study the influence of varying the cross-section of the base substrate and the arrangement of transducers on bandgap generation. This influence is captured by the changes in the electromechanical coupling and stiffness of the metastructure, which appear directly in the formulas for bandgap edge frequencies in ideal conditions. This relationship is illustrated with numerical examples for realistic metastructures with a finite number of transducers. Our focus is on metastructures with sensors and actuators, employing feedback control techniques for resonator implementation as an alternative to shunt circuits. When a bandgap is generated in a finite metastructure, its edge frequencies can be calculated in closed form using the assumption of an infinite number of transducers of infinitesimal length distributed along the structure.

This paper proposes an effective approach to en-hance bandgap depth in metastructures with high damping ratios, utilizing piezoelectric actuators coupled with notch filters for improved vibration isolation. The active control strategy focuses on dynamically attenuating specific resonant frequencies through the application of notch filters within the actuator control loops. AI algorithm, in particular Reinforcement Learning, is employed to optimize the notch filter parameters, thereby fine-tuning the system's response. Numerical validation reveals that this approach not only maintains system stability but also significantly deepens the bandgap. The results highlight that utilizing notched piezo-actuation achieves a more pronounced bandgap depth in overdamped systems compared to traditional piezo-actuated resonators, marking a substantial advancement in vibration control technologies.