PFM Verhoeven

Conference paper (1)

Report (2)

3 records found

Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

Report (1996) - PFM Verhoeven (author) , JF Jongste (author) , G.C.A.M. Janssen (author) , S Radelaar (author) , M Lerme (author) , O Demolliens (author)

Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.

Report (1996) - E Sabouret (author) , PFM Verhoeven (author) , JF Jongste (author) , GCAM Janssen (author) , S Radelaar (author)

Electrical properties of WGex contacts on Ti adhesion layers

Conference paper (1996) - PFM Verhoeven (author) , TGM Oosterflaken (author) , JF Jongste (author) , O Demolliens (author) , G.C.A.M. Janssen (author) , S Radelaar (author)