Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications

Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode

The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst

Enhancement of AlN slender piezoelectric cantilevers actuation by PECVD silicon nitride coating

Self-biased low loss conductor featured with skin effect suppression for high quality RF passives

Encapsulated aluminum nitride SAW devices for liquid sensing applications

Contact resistance of low-temperature carbon nanotube vertical interconnects

High-quality integrated inductors based on multilayered meta-conductors

A molybdenum MEMS microhotplate for high-temperature operation

Homogeneous superconducting phase in TiN film: A complex impedance study

Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

Electrical characterisation of low temperature aligned carbon nanotubes for vertical interconnects

Sputtered molybdenum as conductive material for high-temperature microhotplates

High quality factor RF inductors using low loss conductor featured with skin effect suppression for standard CMOS/BiCMOS

Single-grain Si TFTs for high-speed flexible electronics

Integrating low temperature aligned carbon nanotubes as vertical interconnects in Si technology

Process for low temperature deposition of strain gauge materials based on chromium nitride thin films