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L Qi

Conference paper (3)

3 records found

1

Chemical vapor deposition of Ga dopants for fabricating ultrashallow p-n junctions at 400 *C

Conference paper (2010) - A Sammak (author) , L Qi (author) , W.B. De Boer (author) , LK Nanver (author)

Arbitrarily shallow arsenic deposited junctions on silicon tuned by excimer laser annealing

Conference paper (2010) - G. Lorito (author) , L Qi (author) , L.K. Nanver (author)

Chemical Vapor Deposition of Gallium on Silicon and SiO2

Conference paper (2009) - Amir Sammak (author) , Wiebe de Boer (author) , L.K. Nanver (author) , L Qi (author) , G Lorito (author)