Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

V Gonda (TU Delft - Old - EWI Sect. ECTM)

Y Civale (TU Delft - Old - EWI Sect. ECTM)

T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)

L. la Spina (TU Delft - Old - EWI Sect. ECTM)

H. Schellevis (TU Delft - Electronic Components, Technology and Materials)

G Lorito (TU Delft - Old - EWI Sect. ECTM)

F Sarubbi (TU Delft - Electronic Components, Technology and Materials)

M Popadic (TU Delft - Electronic Components, Technology and Materials)

K Buisman (TU Delft - Electronics)

S. Milosavljević (TU Delft - Electronic Components, Technology and Materials)

E.J.G. Goudena (TU Delft - Old - EWI Sect. ECTM)