Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)

V Gonda (TU Delft - Old - EWI Sect. ECTM)

Y Civale (TU Delft - Old - EWI Sect. ECTM)

TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)

L. La Spina (TU Delft - Old - EWI Sect. ECTM)

H Schellevis (TU Delft - Electronic Components, Technology and Materials)

G Lorito (TU Delft - Old - EWI Sect. ECTM)

F Sarubbi (TU Delft - Electronic Components, Technology and Materials)

M Popadic (TU Delft - Electronic Components, Technology and Materials)

K Buisman (TU Delft - Electronics)

S. Milosavljevic (TU Delft - Electronic Components, Technology and Materials)

EJG Goudena (TU Delft - Old - EWI Sect. ECTM)