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Self-Sealing Complex Oxide Resonators

Journal Article (2022)
Authors

Martin Lee (TU Delft - QN/Steeneken Lab, Kavli institute of nanoscience Delft)

Martin P. Robin (TU Delft - Dynamics of Micro and Nano Systems)

R.H. Guis (TU Delft - Dynamics of Micro and Nano Systems)

U. Filippozzi (Kavli institute of nanoscience Delft, TU Delft - QN/Caviglia Lab)

D. Shin (Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab)

T.C. van Thiel (Kavli institute of nanoscience Delft, TU Delft - QN/Caviglia Lab)

Stijn P. Paardekooper (Student TU Delft)

Johannes R. Renshof (Student TU Delft, Kavli institute of nanoscience Delft)

Herre S J van der Zant (TU Delft - QN/van der Zant Lab, Kavli institute of nanoscience Delft)

Andrea Caviglia (TU Delft - QN/Caviglia Lab, Kavli institute of nanoscience Delft)

Gerard Verbiest (TU Delft - Dynamics of Micro and Nano Systems)

Peter Steeneken (TU Delft - Dynamics of Micro and Nano Systems, Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab)

Research Group
QN/Steeneken Lab
Copyright
© 2022 M. Lee, M.P. Robin, R.H. Guis, U. Filippozzi, D. Shin, T.C. van Thiel, Stijn P. Paardekooper, Johannes R. Renshof, H.S.J. van der Zant, A. Caviglia, G.J. Verbiest, P.G. Steeneken
To reference this document use:
https://doi.org/10.1021/acs.nanolett.1c03498
More Info
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Publication Year
2022
Language
English
Copyright
© 2022 M. Lee, M.P. Robin, R.H. Guis, U. Filippozzi, D. Shin, T.C. van Thiel, Stijn P. Paardekooper, Johannes R. Renshof, H.S.J. van der Zant, A. Caviglia, G.J. Verbiest, P.G. Steeneken
Research Group
QN/Steeneken Lab
Issue number
4
Volume number
22
Pages (from-to)
1475-1482
DOI:
https://doi.org/10.1021/acs.nanolett.1c03498
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Abstract

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.