Integration of MOSFETs with SiGe dots as stressor material

Lis Nanver (TU Delft - Electronic Components, Technology and Materials)

V. Jovanovic (TU Delft - Electronic Components, Technology and Materials)

C Biasotto (TU Delft - Electronic Components, Technology and Materials)

J Moers (External organisation)

D Gruetzmacher (External organisation)

JJ Zhang (External organisation)

N Hrauda (External organisation)

M Stoffel (External organisation)

F Pezzoli (External organisation)

OG Schmidt (External organisation)

L Miglio (External organisation)

H Kosina (External organisation)

A Marzegalli (External organisation)

G Vastola (External organisation)

G Mussler (External organisation)

J Stangl (External organisation)

G Bauer (External organisation)

J van der Cingel (TU Delft - Electronic Components, Technology and Materials)

E Bonera (External organisation)