Effects of crystallographic orientation of single-crystalline seed on ¿-Czochralski process in excimer-laser crystallization

M He (TU Delft - Electronic Components, Technology and Materials)

R. Ishihara (TU Delft - Electronic Components, Technology and Materials)

Y Hiroshima (External organisation)

S Inoue (External organisation)

T Shimoda (External organisation)

JW Metselaar (TU Delft - Electronic Components, Technology and Materials)

S Tsukamoto (External organisation)

C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)

Y van Aandel (External organisation)