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S Tsukamoto
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Authored
3 records found
Process simulation of laser crystallization and analysis of crystallization process of Si films
Conference paper -
F Kimura
,
R Saito
,
S Tsukamoto
,
Y Hiroshima
,
M Dorfan
,
S Inoue
,
T Shimoda
,
R. Ishihara
,
Y van Aandel
Effects of crystallographic orientation of single-crystalline seed on ¿-Czochralski process in excimer-laser crystallization
Conference paper -
M He
,
R. Ishihara
,
Y Hiroshima
,
S Inoue
,
T Shimoda
,
JW Metselaar
,
S Tsukamoto
,
C.I.M. Beenakker
,
Y van Aandel
Analysis of ¿-Czochralski technique using two-dimensional crystallization simulator
Journal article -
K Matsuki
,
R Saito
,
S Tsukamoto
,
M Kimura
,
R. Ishihara