Laser-cut patterned, micrometer-thin diamond membranes with coherent color centers for open microcavities
Yanik Herrmann (Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre, TU Delft - QID/Hanson Lab)
Julia M. Brevoord (Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre, TU Delft - QID/Hanson Lab)
Julius Fischer (Kavli institute of nanoscience Delft, TU Delft - QID/Hanson Lab, TU Delft - QuTech Advanced Research Centre)
Stijn Scheijen (Kavli Institute of Nanoscience Discovery, TU Delft - QuTech Advanced Research Centre, TU Delft - QID/Hanson Lab)
Colin Sauerzapf (TU Delft - QuTech Advanced Research Centre, Kavli institute of nanoscience Delft, TU Delft - QID/Hanson Lab)
Nina Codreanu (TU Delft - QID/Hanson Lab, Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre)
Leonardo G.C. Wienhoven (Kavli institute of nanoscience Delft, TU Delft - QID/Hanson Lab, TU Delft - QuTech Advanced Research Centre)
Yuran M.Q. van der Graaf (Student TU Delft, Kavli institute of nanoscience Delft)
Cornelis F.J. Wolfs (Student TU Delft)
Régis Méjard (Kavli institute of nanoscience Delft, TU Delft - Quantum Internet Division)
Maximilian Ruf (TU Delft - QuTech Advanced Research Centre, Kavli institute of nanoscience Delft, Sandbox AQ, Palo Alto, TU Delft - QID/Hanson Lab)
Nick de Jong (TNO)
Ronald Hanson (TU Delft - QN/Hanson Lab, TU Delft - QID/Hanson Lab, Kavli institute of nanoscience Delft)
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Abstract
Micrometer-scale thin diamond devices are key components for various quantum sensing and networking experiments, including the integration of color centers into optical microcavities. In this work, we introduce a laser-cutting method for patterning microdevices from millimeter-sized diamond membranes. The method can be used to fabricate devices with micrometer thicknesses and edge lengths of typically 10-100 µm. We compare this method with an established nanofabrication process based on electron-beam lithography, a two-step transfer pattern utilizing a silicon nitride hard mask material, and reactive ion etching. Microdevices fabricated using both methods are bonded to a cavity Bragg mirror and characterized using scanning cavity microscopy. We record two-dimensional cavity finesse maps over the devices, revealing insights about the variation in diamond thickness, surface quality, and strain. The scans demonstrate that devices fabricated by laser-cutting exhibit similar properties to devices obtained by the conventional method. Finally, we show that the devices host optically coherent Tin- and Nitrogen-Vacancy centers suitable for applications in quantum networking.
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