Micrometer-scale thin diamond devices are key components for various quantum sensing and networking experiments, including the integration of color centers into optical microcavities. In this work, we introduce a laser-cutting method for patterning microdevices from millimeter-sized diamond membranes. The method can be used to fabricate devices with micrometer thicknesses and edge lengths of typically 10-100 µm. We compare this method with an established nanofabrication process based on electron-beam lithography, a two-step transfer pattern utilizing a silicon nitride hard mask material, and reactive ion etching. Microdevices fabricated using both methods are bonded to a cavity Bragg mirror and characterized using scanning cavity microscopy. We record two-dimensional cavity finesse maps over the devices, revealing insights about the variation in diamond thickness, surface quality, and strain. The scans demonstrate that devices fabricated by laser-cutting exhibit similar properties to devices obtained by the conventional method. Finally, we show that the devices host optically coherent Tin- and Nitrogen-Vacancy centers suitable for applications in quantum networking.

The negatively charged tin-vacancy (SnV⁻) center in diamond has emerged as a promising platform for quantum computing and quantum networks. To connect SnV⁻ qubits in large networks, in situ tuning and stabilization of their optical transitions are essential to overcome static and dynamic frequency offsets induced by the local environment. Here, we report on the large-range optical frequency tuning of diamond SnV⁻ centers using micro-electro-mechanically mediated strain control in photonic integrated waveguide devices. We realize a tuning range of >40 GHz, covering a major part of the inhomogeneous distribution. In addition, we employ real-time feedback on the strain environment to stabilize the resonance frequency and mitigate spectral wandering. These results provide a path for on-chip scaling of diamond SnV-based quantum networks.

Open microcavities offer great potential for the exploration and utilization of efficient spin-photon interfaces with Purcell-enhanced quantum emitters thanks to their large spectral and spatial tunability combined with high versatility of sample integration. However, a major challenge for this platform is the sensitivity to cavity length fluctuations in the cryogenic environment, which leads to cavity resonance frequency variations and thereby a lowered averaged Purcell enhancement. This work presents a closed-cycle cryogenic fiber-based microcavity setup, which is in particular designed for a low passive vibration level, while still providing large tunability and flexibility in fiber and sample integration, and high photon collection efficiency from the cavity mode. At temperatures below 10 K, a stability level of around 25 pm is reproducibly achieved in different setup configurations, including the extension with microwave control for manipulating the spin of cavity-coupled quantum emitters, enabling a bright photonic interface with optically active qubits.