Micrometer-scale thin diamond devices are key components for various quantum sensing and networking experiments, including the integration of color centers into optical microcavities. In this work, we introduce a laser-cutting method for patterning microdevices from millimeter-sized diamond membranes. The method can be used to fabricate devices with micrometer thicknesses and edge lengths of typically 10-100 µm. We compare this method with an established nanofabrication process based on electron-beam lithography, a two-step transfer pattern utilizing a silicon nitride hard mask material, and reactive ion etching. Microdevices fabricated using both methods are bonded to a cavity Bragg mirror and characterized using scanning cavity microscopy. We record two-dimensional cavity finesse maps over the devices, revealing insights about the variation in diamond thickness, surface quality, and strain. The scans demonstrate that devices fabricated by laser-cutting exhibit similar properties to devices obtained by the conventional method. Finally, we show that the devices host optically coherent Tin- and Nitrogen-Vacancy centers suitable for applications in quantum networking.

An efficient interface between a spin qubit and single photons is a key enabling system for quantum science and technology. We report on a coherently controlled diamond nitrogen-vacancy center electron spin qubit that is optically interfaced with an open microcavity. Through Purcell enhancement and an asymmetric cavity design, we achieve efficient collection of resonant photons, while on-chip microwave lines allow for spin qubit control at a 10 MHz Rabi frequency. With the microcavity tuned to resonance with the nitrogen-vacancy center’s optical transition, we use excited state lifetime measurements to determine a Purcell factor of 7.3 ± 1.6. Upon pulsed resonant excitation, we find a coherent photon detection probability of 0.5% per pulse. Although this result is limited by the finite excitation probability, it already presents an order of magnitude improvement over the solid immersion lens devices used in previous quantum network demonstrations. Furthermore, we use resonant optical pulses to initialize and read out the electron spin. By combining the efficient interface with spin qubit control, we generate two-qubit and three-qubit spin-photon states and measure heralded Z-basis correlations between the photonic time-bin qubits and the spin qubit.

We demonstrate coherent coupling of a single diamond Tin-Vacancy center to a fiber-based microcavity, showing a cavity transmission dip of 50 % on resonance, and altered photon statistics in cavity transmission.

Open microcavities offer great potential for the exploration and utilization of efficient spin-photon interfaces with Purcell-enhanced quantum emitters thanks to their large spectral and spatial tunability combined with high versatility of sample integration. However, a major challenge for this platform is the sensitivity to cavity length fluctuations in the cryogenic environment, which leads to cavity resonance frequency variations and thereby a lowered averaged Purcell enhancement. This work presents a closed-cycle cryogenic fiber-based microcavity setup, which is in particular designed for a low passive vibration level, while still providing large tunability and flexibility in fiber and sample integration, and high photon collection efficiency from the cavity mode. At temperatures below 10 K, a stability level of around 25 pm is reproducibly achieved in different setup configurations, including the extension with microwave control for manipulating the spin of cavity-coupled quantum emitters, enabling a bright photonic interface with optically active qubits.

We show diamond Tin-Vacancy centers, coherently-coupled to a tunable microcavity. The exceptional optical properties of this emitter in combination with a stable, high quality cavity enables a cavity transmission signal modulated by a single emitter.