Micrometer-scale thin diamond devices are key components for various quantum sensing and networking experiments, including the integration of color centers into optical microcavities. In this work, we introduce a laser-cutting method for patterning microdevices from millimeter-sized diamond membranes. The method can be used to fabricate devices with micrometer thicknesses and edge lengths of typically 10-100 µm. We compare this method with an established nanofabrication process based on electron-beam lithography, a two-step transfer pattern utilizing a silicon nitride hard mask material, and reactive ion etching. Microdevices fabricated using both methods are bonded to a cavity Bragg mirror and characterized using scanning cavity microscopy. We record two-dimensional cavity finesse maps over the devices, revealing insights about the variation in diamond thickness, surface quality, and strain. The scans demonstrate that devices fabricated by laser-cutting exhibit similar properties to devices obtained by the conventional method. Finally, we show that the devices host optically coherent Tin- and Nitrogen-Vacancy centers suitable for applications in quantum networking.

Open microcavities offer great potential for the exploration and utilization of efficient spin-photon interfaces with Purcell-enhanced quantum emitters thanks to their large spectral and spatial tunability combined with high versatility of sample integration. However, a major challenge for this platform is the sensitivity to cavity length fluctuations in the cryogenic environment, which leads to cavity resonance frequency variations and thereby a lowered averaged Purcell enhancement. This work presents a closed-cycle cryogenic fiber-based microcavity setup, which is in particular designed for a low passive vibration level, while still providing large tunability and flexibility in fiber and sample integration, and high photon collection efficiency from the cavity mode. At temperatures below 10 K, a stability level of around 25 pm is reproducibly achieved in different setup configurations, including the extension with microwave control for manipulating the spin of cavity-coupled quantum emitters, enabling a bright photonic interface with optically active qubits.