Print Email Facebook Twitter Characterization and Analysis of On-Chip Microwave Passive Components at Cryogenic Temperatures Title Characterization and Analysis of On-Chip Microwave Passive Components at Cryogenic Temperatures Author Patra, B (TU Delft OLD QCD/Charbon Lab) Mehrpoo, M. (TU Delft OLD QCD/Charbon Lab; Broadcom Netherlands B.V.) Ruffino, A. (TU Delft (OLD)Applied Quantum Architectures; Swiss Federal Institute of Technology) Sebastiano, F. (TU Delft (OLD)Applied Quantum Architectures) Charbon-Iwasaki-Charbon, E. (Swiss Federal Institute of Technology) Babaie, M. (TU Delft Electronics) Date 2020 Abstract This paper presents the characterization and modeling of microwave passive components in TSMC 40-nm bulk CMOS, including metal-oxide-metal (MoM) capacitors, transformers, and resonators, at deep cryogenic temperatures (4.2 K). To extract the parameters of the passive components, the pad parasitics were de-embedded from the test structures using an open fixture. The variations in capacitance, inductance and quality factor are explained in relation to the temperature dependence of the physical parameters, and the resulting insights on the modeling of passives at cryogenic temperatures are provided. Modeling the characteristics of on-chip passive components, presented for the first time down to 4.2 K, is essential in designing cryogenic CMOS radio-frequency integrated circuits, a promising candidate to build the electronic interface for scalable quantum computers. Subject Cryo-CMOSQuantum computingCryogenicCapacitorInductorsTransformerResonatorsQuality factor To reference this document use: http://resolver.tudelft.nl/uuid:dc2d4e16-f294-4de4-aa65-45841c871d01 DOI https://doi.org/10.1109/JEDS.2020.2986722 Source IEEE Journal of the Electron Devices Society, 8 (1), 448-456 Part of collection Institutional Repository Document type journal article Rights © 2020 B Patra, M. Mehrpoo, A. Ruffino, F. Sebastiano, E. Charbon-Iwasaki-Charbon, M. Babaie Files PDF 09060975.pdf 1.7 MB Close viewer /islandora/object/uuid:dc2d4e16-f294-4de4-aa65-45841c871d01/datastream/OBJ/view