Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising candidate for the next generationmetrology solutions in the semiconductor industry, as it can image wafer samples in reflection geometry at the nanoscale. This technique has surged attention recently, owing to the significant progress in high-harmonic generation (HHG) EUV sources and advancements in both hardware and software for computation. In this study, a novel algorithm is introduced and tested, which enables wavelength-multiplexed reconstruction that enhances the measurement throughput and introduces data diversity, allowing the accurate characterisation of sample structures. To tackle the inherent instabilities of the HHG source, a modal approach was adopted, which represents the cross-density function of the illumination by a series of mutually incoherent and independent spatial modes. The proposed algorithm was implemented on a mainstream machine learning platform, which leverages automatic differentiation to manage the drastic growth in model complexity and expedites the computation using GPU acceleration. By optimising over 200 million parameters, we demonstrate the algorithm's capacity to accommodate experimental uncertainties and achieve a resolution approaching the diffraction limit in reflection geometry. The reconstruction of wafer samples with 20-nm high patterned gold structures on a silicon substrate highlights our ability to handle complex physical interrelations involving a multitude of parameters. These results establish ptychography as an efficient and accurate metrology tool.@en

Computational imaging is increasingly vital for a broad spectrum of applications, ranging from biological to material sciences. This includes applications where the object is known and sufficiently sparse, allowing it to be described with a reduced number of parameters. When no explicit parameterization is available, a deep generative model can be trained to represent an object in a low-dimensional latent space. In this paper, we harness this dimensionality reduction capability of autoencoders to search for the object solution within the latent space rather than the object space. We demonstrate what we believe to be a novel approach to ptychographic image reconstruction by integrating a deep generative model obtained from a pre-trained autoencoder within an automatic differentiation ptychography (ADP) framework. This approach enables the retrieval of objects from highly ill-posed diffraction patterns, offering an effective method for noise-robust latent vector reconstruction in ptychography. Moreover, the mapping into a low-dimensional latent space allows us to visualize the optimization landscape, which provides insight into the convexity and convergence behavior of the inverse problem. With this work, we aim to facilitate new applications for sparse computational imaging such as when low radiation doses or rapid reconstructions are essential.

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Optical measurements often exhibit mixed Poisson–Gaussian noise statistics, which hampers the image quality, particularly under low signal-to-noise ratio (SNR) conditions. Computational imaging falls short in such situations when solely Poissonian noise statistics are assumed. In response to this challenge, we define a loss function that explicitly incorporates this mixed noise nature. By using a maximum-likelihood estimation, we devise a practical method to account for a camera readout noise in gradient-based ptychography optimization. Our results, based on both experimental and numerical data, demonstrate that this approach outperforms the conventional one, enabling enhanced image reconstruction quality under challenging noise conditions through a straightforward methodological adjustment.

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The scientific community recognizes the critical role played by ptychography in nanoscale imaging. Compared with the conventional imaging, which has high requirements on the manufacturing of optical elements, ptychography, as a computational imaging technique, uses a set of measured intensities of the diffraction patterns to reconstruct the image of the object and hence no imaging system is needed. This technique is especially useful in the short wavelength, e.g. EUV, regime, where manufacturing high quality optical elements such as mirrors is extremely expensive.

Most of the present ptychographic algorithms require the illumination of the object to be both spatially and temporally coherent so that the diffraction pattern can be interpreted as the intensity of the Fourier transform of the field exiting the object. However, the coherence of the sources that produce the EUV radiation often cannot be guaranteed. Therefore, it is crucial to extend the ptychography method to consider partial coherence effects. This requires the use of a flexible propagator which depends on the wavelength to deal with the temporal partial coherence and a modal representation for the spatially partially coherent field. Also, the ambiguity of the reconstructed modes of the probe will be solved by an orthogonalization approach, which could enhance the reproducibility of the results. These methods will be implemented on an existing ptychography platform based on automatic-differentiation and will be validated using both simulation data and experimental data.

Because of the growing demand for more advanced electric devices, an exponential growth of the number of transistors are supposed to be integrated into a single chip. To manufacture devices in the scale of nanometer cost-effectively, an accurate measurement for lithography process calibrating is necessary. Ptychography is a computational imaging technique which has the potential to serve as a metrology solution for semiconductor devices. It can reconstruct complex-valued permittivity function of an object from an extensive set of measured intensities of the diffraction patterns in the far field. It should be noted that also 2D and 3D a-periodic objects can be measured with this technique. Currently, this technique has been widely used in reconstructing thin and weakly scattering (satisfying the first Born approximation) objects in a transmission geometry (detectors and sources are placed on different sides of the objects).We propose an accurate 3D ptychography multi-layer Born model, and apply it to reconstruct refractive index distributions of semi-conductors. This model slices the sample into thin layers and first Born approximations are applied to each layer sequentially. For a transmission geometry, this model considers both forward scattering effects and backward scattering effects \cite{Chen2020Multi-layerMicroscopy}, as opposed to normal beam propagation models. For reflection geometry (detectors and sources are placed on the same side of the object), this model collects reflected fields on each layer of the sample and these fields will interact with the object again later together with other upwards fields. This procedure enables detectors arranged in a reflection geometry to gather complete information about the object. We implement the model on the existing ptychography platform based on the auto-differentiation (AD) solvers and manage to reconstruct high-resolution images of 3D objects.

We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.@en

In this thesis we try to provide novel solutions to key problems related to imaging and imaging system. Imaging is usually referred to as the technique for reproducing the information of the object. In optics, we usually refer the object information to the light field in the object plane due to the interaction of the illumination field and the object. Imaging technique allows the reproduced object information to be recorded by detectors such as human eye, photo resist, or CCD/CMOS sensor. In order to image an object, there must be light. We consider only un polarized quasi-monochromatic light illuminating the object and we approximate the field in the object plane by the multiplication of the transmittance / reflectance of the object and the illumination field (the first Born approximation). However, the results in this thesis can also be generalized to situations beyond the above scope. Here we mainly focus on two aspects: the aberrations, the errors of the imaging system, and the spatial coherence of the light field. In a typical imaging scenario, we consider the object plane field as a source consisting a series of point sources. The field generated by each point source propagates independently to the image plane through the imaging system. Ideally, these fields should all identically have the correct distribution and be centered at the correct location. However, this is not the case in presence of the aberrations. As a result, the image will become blurred. @en

For advanced imaging systems, e.g., projection systems for optical lithography, spatially varying aberration calibration is of utmost importance to achieve uniform imaging performance over the entire field-of-view (FOV). Here we present an efficient, accurate, and robust spatially varying aberration calibration method using a pair of 2-dimensional periodic pinhole array masks: the first mask in the object plane and the second mask in the image plane. Our method divides the entire FOV of the imaging system into partially overlapping subregions by using a measurement system consisting of an additional imaging system and a camera sensor. Each subregion, which covers several mask periods, is imaged onto a distinct camera pixel by the measurement system. Our method measures “Airy disc”-like patterns simultaneously in all subregions by scanning the second mask relative to the first mask over one mask p eriod. The number of subregions is equal to the number of camera pixels, and the sampling number of the measured patterns is equal to the scanning step number. The aberrations can be retrieved from the patterns measured in through-focus planes using an iterative optimization algorithm. In this paper, we performed experimental validation on a realistic lithography machine and demonstrate that our method is capable of retrieving the coefficients of 37 aberration terms, expressed as Zernike polynomials, with a sensitivity at nanometer scale.@en

We propose and experimentally demonstrate a noniterative diffractive imaging method for reconstructing the complex-valued transmission function of an object illuminated by spatially partially coherent light from the far-field diffraction pattern. Our method is based on a pinhole array mask, which is specially designed such that the correlation function in the mask plane can be obtained directly by inverse Fourier transforming the diffraction pattern. Compared to the traditional iterative diffractive imaging methods using spatially partially coherent illumination, our method is noniterative and robust to the degradation of the spatial coherence of the illumination. In addition to diffractive imaging, the proposed method can also be applied to spatial coherence property characterization, e.g., free-space optical communication and optical coherence singularity measurement.

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In the theory of partial coherence, coherence singularities can occur in the spectral degree of coherence (SDOC): in case the fields at two different points are completely uncorrelated, the phase of the SDOC is undefined. For a partially coherent vortex beam, the detection of coherence singularities is linked to the measurement of topological charge, whose magnitude equals the number of ring dislocations in its far field amplitude. However, the phase distribution of coherence singularities is rarely mentioned in the literature and the amplitude distribution can hardly reflect the sign of topological charge. In this letter, we present a phase-analysis method for measuring the coherence singularities by introducing a movable perturbation at a certain point in an illumination window of a finite size. Using the proposed method, we measure experimentally the coherence singularities of a partially coherent vortex beam in the focal plane. From the results, the magnitude and sign of the topological charge can be determined simultaneously from the phase distribution of the coherence singularities. Our results can find application in information transmission.

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The complete characterization of spatial coherence is extremely di cult because the mutual coherence function (MCF) is a complex-valued function of four independent Cartesian coordinates. This di culty limits the ability to control and to optimize the spatial coherence in a broad range of key applications. Here we propose an e cient and robust scheme for measuring the complete MCF of an arbitrary partially coherent beam using self-referencing holography, which does not require any prior knowledge or making any assumptions about the MCF. We further apply our method to lensless di ractive imaging, and experimentally demonstrate the reconstruction of a phase object under spatially partially coherent illumination. This application is particularly useful for imaging at short wavelengths, where the illumination sources lack spatial coherence and no high-quality imaging optics are available.

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Cameras are used in various applications and one such common application has been space. Delfi Space is the CubeSat Development program of the Delft University of Technology and a subprogram of Defi-Space is Delfi-PQ which aims to develop PocketQubes which are an order of magnitude smaller than the CubeSat standards. One of the advanced payloads that would potentially be a part of the Delfi-PQ is an imager/camera. The imager needs to be as small as possible in order to fit into the Delfi-PQ satellites. The design of the camera has remained the same throughout the years and one of the reasons that increase the thickness of the camera is the presence of lenses. A way to reduce the size of the camera would be to remove the lens out of the equation. However, this introduces additional problems and trade-offs in the camera. These lenses can be replaced by masks/coded apertures. One of the additional steps in using coded-apertures is that additional computational steps need to be performed in order to reconstruct the image. The kind of computation that needs to be performed depends on the kind of masks that would be used. In this thesis, a separable mask is chosen and computer simulations on separable masks have been performed. Two image sensors that can be used in the picosatellite were chosen for implementation and the hardware/software is designed and developed. The experimental setup for determining the field of view of a lensless camera has been developed and tested. One of the trade-offs observed through the experiments is that the acceptance angle of a lensless imager had reduced by 38 percent and 31.8 percent in the horizontal and vertical directions compared to a conventional lens-based system. Based on the experimental results, the field of view of the camera has also been determined. A singular value decomposition based method has been developed and is used to align and calibrate the camera with the mask. The final step is estimating the system matrices of the lensless system. The system matrices enable the perfect reconstruction and a complete realization of a separable mask based lensless camera. A scheme for estimating the system matrices of the lensless imager using Hadamard basis is proposed and confirmed using simulations and the strategy for experimental verification is proposed. As far as we know, this is the first study that focuses on designing and developing a lensless camera in the visible light domain for use in picosatellites.

The application of Moiré effect for testing of a lithographic projection lens is reported. The arrangement presented allows measuring magnification, distortion, field curvature and telecentricity of the lens and can be used for its fine tuning. The method is based on two matched two-dimensional gratings, positioned in mutually conjugated planes; one of them can be translated. Visual interpretation of Moiré fringe pattern allows quick diagnostics of position errors exceeding critical dimension, whereas lateral scanning is applied for measuring of smaller magnitude errors. Field curvature and telecentricity are measured by 3D scanning. Presented results are in a good agreement with those obtained elsewhere.@en

The increased usage of liquid lenses motivates us to investigate surface waves on the liquid's surface. During fast focal switching, the surface waves decrease the imaging quality. We propose a model that describes the surface modes appearing on a liquid lens and predicts the resonance frequencies. The effects of those surface modes on a laser beam are simulated using Fresnel propagation, and the model is verified experimentally.

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Wide-angle spectral imaging systems using Fabry-Pérot interferometers face spectral resolution problems, which can only be corrected with high computational effort. A standard lens system is analysed and an alternative telecentric solution is proposed, that solves the issues optically without the use of intensive computation.@en