Yilong Hao | TU Delft Repository

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Yilong Hao

Conference paper (1)

Journal article (1)

2 records found

1

Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Conference paper (1999) - Z Xiao (author) , Guoying Wu (author) , Min Chen (author) , Changde Zhao (author) , Dacheng Zhang (author) , Yilong Hao (author) , ZH Li (author)

Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Journal article (1999) - Z Xiao (author) , Min Chen (author) , Guoying Wu (author) , Changde Zhao (author) , Dacheng Zhang (author) , Yilong Hao (author) , Guobing Zhang (author) , ZH Li (author)