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S Radelaar

Doctoral thesis (3)

3 records found

1

Deep anisotropic dry etching of silicon microstructures by high-density plasmas

Doctoral thesis (2004) - MA Blauw (author) , S Radelaar (promotor) , P. J. French (copromotor) , E.W.J.M. van der Drift (copromotor)

Positrons in the MOS system

Doctoral thesis (1998) - M Clement (author) , A van Veen (promotor) , S Radelaar (copromotor)

Mo/Si multilayer optics for micro-lithography

Doctoral thesis (1997) - HJ Voorma (author) , S Radelaar (promotor) , MJ van der Wiel (copromotor)