Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films

Self-aligned micro-optic integrated photonic platform

Calibrated quantum thermometry in cavity optomechanics

Metal and Polymeric Strain Gauges for Si-based, Monolithically Fabricated Organs-on-Chips

Quantum thermometry in optomechanics

A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner

A highly miniturized single-chip MOEMS scanner for all-in-one imaging solution

MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing

Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics

Quantum nondemolition measurement of optical field fluctuations by optomechanical interaction

Quantum nondemolition measurement of light intensity fluctuations in an optomechanical experiment

Integrated SiGe Detectors for Si Photonic Sensor Platforms

Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators

Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications

PEDOT:PSS: A Conductive and Flexible Polymer for Sensor Integration in Organ-on-Chip Platforms

The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides

Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating

Reflectance-based two-dimensional TiO2 photonic crystal liquid sensors