JJ Koning | TU Delft Repository

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JJ Koning

Conference paper (2)

2 records found

1

Below-IC post-CMOS integration of thick MEMS on a thin-SOI platform using embedded interconnects

Conference paper (2012) - V. Rajaraman (author) , JJ Koning (author) , E Ooms (author) , G Pandraud (author) , KAA Makinwa (author) , H Boezen (author)

Hermeticity and thermal stability testing of PECVD silicon nitride thin-film packages

Conference paper (2008) - Q Li (author) , Johannes Goosen (author) , JTM van Beek (author) , Fred van Van Keulen (author) , KL Phan (author) , B. van Velzen (author) , JJM Bontemps (author) , JJ Koning (author) , Guo Qi Z Zhang (author)