Spectral measurement using IC compatible linear variable optical filter

CMOS compatible LVOF based visible microspectrometer

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

An UV linear variable optical filter based micro spectrometer

Optical microspectrometers using imaging diffraction gratings

Spectral measurement with a linear variable filter using a LMS algorithm

Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays

Interference filter based IR absorber for MEMS thermopile array

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

IC-compatible fabrication of linear variable optical filters for micro-spectrometer

Microspectrometer with a concave grating fabricated in a MEMS technology

Study of thermal cross-talk in micromachined thermopile based infrared detector arrays

Vertically tapered layers for optical applications fabricated using resist reflow

Planar MEMS-compatible microspectrograph

Concave diffraction gratings fabricated with planar lithography

IC-compatible microspectrometer using a planar imaging diffraction grating

Cross-talk characterization of thermal detector array

Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

Characterization of thermal cross-talk in a thermopile detector

Optimal implementation of a microspectrometer based on a single flat diffraction grating