An Evaluation of Silicon Carbide Based Bimorph Actuators for Optical Coherence Tomography Applications

Optical coherence tomography (OCT) probes rely on MEMS micro-scanners to provide fast and reproducible scans covering as much area as possible. A popular choice of actuators employed in this role are electrothermal bimorph actuators. They comprise of two layers of different materials which are rigidly joined together. Differential expansion...

Nano Optomechanical Read-out for Microcantilever Sensors

This thesis demonstrates a novel displacement sensor with photonic structure a micro ring resonator with a micro cantilever. This device uses the working principle of micro ring resonator and transfer the mechanical signal into optical signal. The goal of this project is to design, fabricate and measure such a device. Fabrication process is not...

Opto-electronic MEMS oscillator for resonant pressure sensing

This thesis details the design of a self-oscillating MEMS resonator as a pressure sensor. A bi-layer circular diaphragm with a single center perforation is used as a pressure sensitive membrane which measures the absolute pressure of the surrounding medium. A novel aspect of the proposed sensor is that the resonator is made to oscillate by an...

High Frequency readout scheme for Graphene based NEMS

A mechanical system is an excellent choice for studying forces of varying magnitude. The force produces a displacement of the system under study. By measuring this displacement electrically or optically, the force can characterized. In this thesis, the displacement of a nanoelectromechanical system (NEMS) due to thermal energy is of interest. At...

Micro-Fluidic MEMS for Micro-Particle Filtration

Recently there has been an onset of fluidic filters fabricated using micro electro-mechanical systems (MEMS) technology. These filters, compared to conventional ones, are more accurate and precise due to the highly sophisticated techniques that are used to define and implement the separation mechanism. In order to contribute to this new field of...

Design of a MEMS micro-resistojet

Novel Application of Imprinting Lithography for Multi-bit Ferroelectric Memories

This thesis is about an innovative application of nanoimprinting lithography in organic ferroelectric memories, which can achieve multi-bit data storage. Multi-bit data storage, defined here as storage of multiple bits in a single device cell, can potentially make higher density ferroelectric memory at a lower price. The idea is based on...

Electrical characterization of MEMS microphones

A reliable characterization of a MEMS microphone is essential for a better understanding of the device physics, for estimating the device performance and for guidance during the research, for better microphones. The work presented in this report focuses on the investigation and comparison of different measurement principles and techniques used...

Aluminum Nitride and Chromium Nitride Thin Films for Strain Gauge Application

Silicon MEMS Micro-Evaporator

Refrigeration With And Of Solid State Devices

Solid state coolers are reliable, cheap and easy to scale down to microscopic scales, hence very promising for on chip refrigeration in microelectronics. The previous decade has shown tremendous interest for applications both in science and industry. In this thesis we present an overview on the state of the art possibilities and applications of...

MEMS in automotive: Oil quality sensor

There is a large demand for an online sensor to monitor the quality of lubricating oils. By constant monitoring the engine oil quality, a better understanding of oil condition can be found. The information on oil condition will lead to a much more accurate determination of proper oil change time, while it also provides increased insight into the...

Pattern transfer on vertical cavity sidewalls using SU8

In this master thesis, a process to realize metal lines on the sidewall of high aspect ratio cavities is developed. As alternative to conventional photoresist, SU8 is used to define patterns on vertical sidewalls of deep cavities while maintaining compatibility with conventional IC processes. When transferring a pattern onto 3D structures,...