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FC Voogt
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5 records found
A combined TEM and time-resolved optical reflectivity investigation into the excimer-laser crystallization of a-Si films
Journal article -
FC Voogt
,
R. Ishihara
Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating
Journal article -
M Saadaoui
,
H van Zeijl
,
Pasqualina M Sarro
,
W.H.A. Wien
,
HTM Pham
,
C. Kwakernaak
,
HCM Knoops
,
WMM Kessels
,
RMCM van de Sanden
,
FC Voogt
,
F Roozeboom
Advanced excimer-laser crystallization techniques of Si thin-film for location control of large grain on glass
Conference paper -
R. Ishihara
,
PC van der Wilt
,
BD van Dijk
,
A Burtsev
,
FC Voogt
,
GJ Bertens
,
JW Metselaar
,
C.I.M. Beenakker
Heterogeneous nucleation in excimer-laser melted Si thin-films
Journal article -
R. Ishihara
,
FC Voogt
Melting and crystallization behavior of low-pressure chemical-vapor-deposition amorphous Si films during excimer-laser annealing
Journal article -
FC Voogt
,
R. Ishihara
,
F.D. Tichelaar