T
T Chu Duc
33 records found
1
The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young's modulus of the constrai
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A powerful and effective design of a polymeric thermal microactuator is presented. The design has SU-8 epoxy layers filled and bonded in a meandering silicon (Si) microstructure. The silicon microstructure reinforces the SU-8 layers by lateral restraint. It also improves the tran
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This paper presents the design, simulation and characterization of a new type of in-plane thermal unimorph, which utilizes composite SU-8/silicon microstructures. The unimorph consists of a silicon skeleton and SU-8 photoresist, which encapsulates the silicon skeleton. The silico
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This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 µm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockw
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This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-µm long, 56
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