Direct interactions between quantum particles naturally fall off with distance. However, future quantum computing architectures are likely to require interaction mechanisms between qubits across a range of length scales. In this work, we demonstrate a coherent interaction between two semiconductor spin qubits 250 μm apart using a superconducting resonator. This separation is several orders of magnitude larger than for the commonly used direct interaction mechanisms in this platform. We operate the system in a regime in which the resonator mediates a spin–spin coupling through virtual photons. We report the anti-phase oscillations of the populations of the two spins with controllable frequency. The observations are consistent with iSWAP oscillations of the spin qubits, and suggest that entangling operations are possible in 10 ns. These results hold promise for scalable networks of spin qubit modules on a chip.

Full-scale quantum computers require the integration of millions of qubits, and the potential of using industrial semiconductor manufacturing to meet this need has driven the development of quantum computing in silicon quantum dots. However, fabrication has so far relied on electron-beam lithography and, with a few exceptions, conventional lift-off processes that suffer from low yield and poor uniformity. Here we report quantum dots that are hosted at a ²⁸Si/²⁸SiO₂ interface and fabricated in a 300 mm semiconductor manufacturing facility using all-optical lithography and fully industrial processing. With this approach, we achieve nanoscale gate patterns with excellent yield. In the multi-electron regime, the quantum dots allow good tunnel barrier control—a crucial feature for fault-tolerant two-qubit gates. Single-spin qubit operation using magnetic resonance in the few-electron regime reveals relaxation times of over 1 s at 1 T and coherence times of over 3 ms.

We report the coherent coupling of two electron spins at a distance via virtual microwave photons. Each spin is trapped in a silicon double quantum dot at either end of a superconducting resonator, achieving spin-photon couplings up to around gs/2p=40 MHz. As the two spins are brought into resonance with each other, but detuned from the photons, an avoided crossing larger than the spin linewidths is observed with an exchange splitting around 2J/2p=20 MHz. In addition, photon-number states are resolved from the shift 2?s/2p=-13 MHz that they induce on the spin frequency. These observations demonstrate that we reach the strong dispersive regime of circuit quantum electrodynamics with spins. Achieving spin-spin coupling without real photons is essential to long-range two-qubit gates between spin qubits and scalable networks of spin qubits on a chip.

Electron spins in Si/SiGe quantum wells suffer from nearly degenerate conduction band valleys, which compete with the spin degree of freedom in the formation of qubits. Despite attempts to enhance the valley energy splitting deterministically, by engineering a sharp interface, valley splitting fluctuations remain a serious problem for qubit uniformity, needed to scale up to large quantum processors. Here, we elucidate and statistically predict the valley splitting by the holistic integration of 3D atomic-level properties, theory and transport. We find that the concentration fluctuations of Si and Ge atoms within the 3D landscape of Si/SiGe interfaces can explain the observed large spread of valley splitting from measurements on many quantum dot devices. Against the prevailing belief, we propose to boost these random alloy composition fluctuations by incorporating Ge atoms in the Si quantum well to statistically enhance valley splitting.

Quantum computers (QC) promise to solve certain computational problems exponentially faster than a classical computer due to the superposition and entanglement properties of quantum bits (qubits). Among several qubit technologies, spin qubits are a promising candidate for large-scale QC, since (1) they have a small footprint allowing them to be densely integrated and (2) they can operate at relatively high temperatures (\gt1\mathrm{K}) [1], potentially reducing system cost and complexity.

Circuit quantum electrodynamics (QED) employs superconducting microwave resonators as quantum buses. In circuit QED with semiconductor quantum-dot-based qubits, increasing the resonator impedance is desirable as it enhances the coupling to the typically small charge dipole moment of these qubits. However, the gate electrodes necessary to form quantum dots in the vicinity of a resonator inadvertently lead to a parasitic port through which microwave photons can leak, thereby reducing the quality factor of the resonator. This is particularly the case for high-impedance resonators, as the ratio of their total capacitance over the parasitic port capacitance is smaller, leading to larger microwave leakage than for 50-ω resonators. Here, we introduce an implementation of on-chip filters to suppress the microwave leakage. The filters comprise a high-kinetic-inductance nanowire inductor and a thin-film capacitor. The filter has a small footprint and can be placed close to the resonator, confining microwaves to a small area of the chip. The inductance and capacitance of the filter elements can be varied over a wider range of values than their typical spiral inductor and interdigitated capacitor counterparts. We demonstrate that the total linewidth of a 6.4 GHz and approximately 3-kω resonator can be improved down to 540 kHz using these filters.

We demonstrate the strong coupling between a single electron spin in silicon and a single photon in a superconducting microwave cavity. Using the same cavity we perform rapid high-fidelity single-shot readout of two-electron spin states.

Silicon spin qubits are one of the leading platforms for quantum computation^1,2. As with any qubit implementation, a crucial requirement is the ability to measure individual quantum states rapidly and with high fidelity. Since the signal from a single electron spin is minute, the different spin states are converted to different charge states^3,4. Charge detection, so far, has mostly relied on external electrometers^5–7, which hinders scaling to two-dimensional spin qubit arrays^2,8,9. Alternatively, gate-based dispersive read-out based on off-chip lumped element resonators has been demonstrated^10–13, but integration times of 0.2–2 ms were required to achieve single-shot read-out^14–16. Here, we connect an on-chip superconducting resonant circuit to two of the gates that confine electrons in a double quantum dot. Measurement of the power transmitted through a feedline coupled to the resonator probes the charge susceptibility, distinguishing whether or not an electron can oscillate between the dots in response to the probe power. With this approach, we achieve a signal-to-noise ratio of about six within an integration time of only 1 μs. Using Pauli’s exclusion principle for spin-to-charge conversion, we demonstrate single-shot read-out of a two-electron spin state with an average fidelity of >98% in 6 μs. This result may form the basis of frequency-multiplexed read-out in dense spin qubit systems without external electrometers, therefore simplifying the system architecture.

In the version of this Letter originally published, the second, third and fourth exponential terms in equation (3) were incorrect; the corrected equation is shown below. (Formula presented.). The correct equation was used for data analysis. The online versions have been amended.

Long coherence times of single spins in silicon quantum dots make these systems highly attractive for quantum computation, but how to scale up spin qubit systems remains an open question. As a first step to address this issue, we demonstrate the strong coupling of a single electron spin and a single microwave photon. The electron spin is trapped in a silicon double quantum dot, and the microwave photon is stored in an on-chip high-impedance superconducting resonator. The electric field component of the cavity photon couples directly to the charge dipole of the electron in the double dot, and indirectly to the electron spin, through a strong local magnetic field gradient from a nearby micromagnet. Our results provide a route to realizing large networks of quantum dot–based spin qubit registers.

We present superconducting microwave-frequency resonators based on NbTiN nanowires. The small cross section of the nanowires minimizes vortex generation, making the resonators resilient to magnetic fields. Measured intrinsic quality factors exceed 2×105 in a 6-T in-plane magnetic field and 3×104 in a 350-mT perpendicular magnetic field. Because of their high characteristic impedance, these resonators are expected to develop zero-point voltage fluctuations one order of magnitude larger than in standard coplanar waveguide resonators. These properties make the nanowire resonators well suited for circuit QED experiments needing strong coupling to quantum systems with small electric dipole moments and requiring a magnetic field, such as electrons in single and double quantum dots.