55 records found
1
Noise analysis of a micro-G pull-in time accelerometer
A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range
A piezoresistive detector design for a high sensitivity pull in time digital accelerometer
Pull in time based acceleration sensing
Time based micro-g accelerometer with improved damper geometry
A piezoresistive detector design for a high sensitivity time based digital accelerometer
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Improved damper geometry for parallel-plate MEMS
Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping
Optimized settling of under-damped electrostatic actuators based on input shaping
Read-out calibration of a SOI capacitive transducer using the pull-in voltage
Damping of electrostatic actuators operated at low air pressure using input shaping
Full-gap positioning of parallel-plate electrostatic MEMS using on-off control
Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
A feedback operated tunable accelerometer: Analysis and design
A test mechanism for device diagnostics and process characterization
Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage
Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning (U-SP-2-I-ICT)
