The large-scale integration of semiconductor spin qubits into quantum processors will require the characterization of quantum components at scale. However, such characterization is challenging and typically requires radio-frequency measurements at millikelvin temperatures and the presence of magnetic fields. Here we report a scalable architecture for characterizing spin qubits using a quantum dot crossbar array. The approach, which we term as the qubit-array research platform for engineering and testing, uses a crossbar array comprising tightly pitched spin-qubit tiles and is implemented in planar germanium, with the potential to host 1,058 single-hole spin qubits. We measure a subset of 40 tiles and demonstrate key device functionality at millikelvin temperatures, including tile addressability, threshold voltage and charge noise statistics, as well as the characterization of hole spin qubits and their coherence times in a single tile.

Silicon-quantum-dot spin qubits have become a promising platform for scalable quantum computing because of their small size and compatibility with industrial semiconductor manufacturing processes. Although Si/SiGe heterostructures are commonly used to host spin qubits due to their high mobility and low percolation density, the SiGe spacer creates a gap between the qubits and control electrodes, which limits the ability to tune the exchange coupling. As a result, residual coupling leads to unwanted single-qubit phase shifts, making multi-qubit control more difficult. In this work, we explore swapping the roles of overlapping nanogates to overcome this issue. By reconfiguring the gate voltages, we demonstrate in situ role switching while maintaining multi-qubit control. Additionally, this method improves the tunability of the exchange coupling by up to 3.6 times. This strategy reduces unintended single-qubit phase shifts and minimizes the complexity of multi-qubit control, supporting scalable growth with minimal experimental overhead.

Evaluation of the quantum lifetime in two-dimensional hole systems, together with band-structure parameters such as the effective mass and g factor, becomes challenging when competing energy scales shape Shubnnikov–de Haas oscillations in a magnetic field. Here, we overcome this challenge for holes with pseudospin J_z = ± ₂ ³, confined in low-disorder strained germanium quantum wells. We extract self-consistently the effective mass, g factor, and quantum lifetime, and estimate a maximum quantum mobility of 133(3) × 10³ cm²/V s, setting a benchmark for holes in group IV semiconductors. The high quality of the hole gas if further highlighted by observing clean fractional quantum Hall states at low magnetic field and density.

Understanding scattering mechanisms in semiconductor heterostructures is crucial to reducing sources of disorder and ensuring high yield and uniformity in large spin qubit arrays. Disorder of the parent two-dimensional electron or hole gas is commonly estimated by the critical, percolation-driven density associated with the metal–insulator transition. However, a reliable estimation of the critical density within percolation theory is hindered by the need to measure conductivity with high precision at low carrier densities, where experiments are most difficult. Here, we connect experimentally percolation density and quantum Hall plateau width, in line with an earlier heuristic intuition, and offer an alternative method for characterizing semiconductor heterostructure disorder.

Recent advances in coherent spin shuttling have made sparse semiconductor spin-qubit arrays an appealing solid-state platform to realize quantum processors^{1, 2, 3, 4, 5, 6–7}. The dynamic and long-range connectivity enabled by shuttling is also essential for many quantum error-correction schemes^{8, 9–10}. Here we demonstrate a silicon spin-qubit device comprising a shuttling bus for coherently transporting qubits that can interact at four isolated locations that we call bus stops. We dynamically populate the array and tune all single- and two-qubit operations using shuttling and quantum non-demolition spin measurements, without access to charge sensing in most of the device. We achieve universal control of the effective five-qubit processor and select the connectivity required to form a surface-code stabilizer plaquette that supports X- and Z-type parity checks up to weight four. We use the parity checks to generate multi-qubit entanglement between all qubit combinations in the array and report the genuine entanglement of a five-qubit Greenberger–Horne–Zeilinger state, constituting one of the largest such states constructed with gate-defined semiconductor spins. The protocols developed here lay the groundwork for modular calibration and operation of sparse spin-qubit arrays, and we highlight the feasibility of near-term quantum error-correction experiments with mobile spin qubits.

Constricting transport through a one-dimensional quantum point contact in the quantum Hall regime enables gate-tunable selection of the edge modes propagating between voltage probe electrodes. Here, we investigate the quantum Hall effect in a quantum point contact fabricated on low disorder strained germanium quantum wells. For increasing magnetic field, we observe Zeeman spin-split 1D ballistic hole transport evolving to integer quantum Hall states, with well-defined quantized conductance increasing in multiples of e ² / h down to the first integer filling factor ν = 1. These results establish strained germanium as a viable platform for complex experiments probing many-body states and quantum phase transitions.

Electron spins in silicon offer a promising path toward scalable, fault-tolerant quantum computing, with the potential to host millions of qubits. However, scaling up dense quantum-dot arrays and enabling qubit interconnections through shuttling are hindered by uncontrolled lateral variations of the valley splitting energy E_VS. We map E_VS across a 40 nm × 400 nm region of a ²⁸Si/Si_0.7Ge_0.3 shuttle device and analyze the spin coherence of a single electron spin transported by conveyor-belt shuttling. We observe that the E_VS varies over a wide range from 1.5 μeV to 200 μeV and is dominated by SiGe alloy disorder. In regions of low E_VS and at spin-valley resonances, spin coherence is reduced and its dependence on shuttle velocity matches predictions. Rapid and frequent traversal of low-E_VS regions induces a regime of enhanced spin coherence explained by motional narrowing. By selecting shuttle trajectories that avoid problematic areas on the E_VS map, we achieve transport over tens of microns with coherence limited by the coupling to a static electron spin entangled with the mobile qubit. Our results provide experimental confirmation of the theory of spin decoherence of mobile electron spin-qubits and present practical strategies to integrate conveyor-mode qubit shuttling into silicon quantum chips.

Addressing and mitigating decoherence sources plays an essential role in the development of a scalable quantum computing system, which requires low gate errors to be consistently maintained throughout the circuit execution. While nuclear spin-free materials, such as isotopically purified silicon, exhibit intrinsically promising coherence properties for electron spin qubits, the omnipresent charge noise, when converted to magnetic noise under a strong magnetic field gradient, often hinders stable qubit operation within a time frame comparable to the data acquisition time. Here, we demonstrate both open- and closed-loop suppression techniques for the transduced noise in silicon spin qubits, resulting in a more than two-fold (ten-fold) improvement of the inhomogeneous coherence time (Rabi oscillation quality) that leads to a single-qubit gate fidelity of over 99.6% even in the presence of a strong decoherence field gradient. Utilizing gate set tomography, we show that adaptive qubit control also reduces the non-Markovian noise in the system, which validates the stability of the gate fidelity. The technique can be used to learn multiple Hamiltonian parameters and is useful for the intermittent calibration of the circuit parameters with affordable experimental overhead, providing a useful subroutine during the repeated execution of general quantum circuits.

Disorder in the heterogeneous material stack of semiconductor spin qubit systems introduces noise that compromises quantum information processing, posing a challenge to coherently control large-scale quantum devices. Here we exploit low-disorder epitaxial, strained quantum wells in Ge/SiGe heterostructures grown on Ge wafers to comprehensively probe the noise properties of complex micrometre-scale devices, comprising quantum dots arranged in a two-dimensional array. We demonstrate an average low charge noise across different locations on the wafer, providing a benchmark for quantum confined holes. We then establish spin qubit control and extend our investigation from electrical to magnetic noise through spin echo measurements. Exploiting dynamical decoupling sequences, we quantify the power spectral density components arising from the hyperfine interaction with ⁷³Ge spinful isotopes and identify coherence modulations associated with the interaction with the ²⁹Si nuclear spin bath near the Ge quantum well, underscoring the need for full isotopic purification of the qubit host environment.

Electron-spin qubits in Si/SiGe quantum wells are limited by the small and variable energy separation of the conduction-band valleys. While sharp quantum-well interfaces are pursued to increase the valley-splitting energy deterministically, here we explore an alternative approach to enhancing the valley splitting on average. We grow increasingly thinner quantum wells with broad interfaces to controllably increase the electron wave function overlap with Ge atoms. Quantum Hall measurements of two-dimensional electron gases reveal a linear correlation between valley splitting and disorder-induced single-particle energy-level broadening, driven by increasing alloy scattering at the Si/SiGe interface. We demonstrate enhanced valley splitting while maintaining respectable electron mobility, indicating a low-disorder electrostatic potential environment. Simulations using experimental Ge concentration profiles predict an average valley splitting in quantum dots that matches the enhancement observed in two-dimensional systems. Our results motivate the experimental realization of quantum-dot spin qubits in these heterostructures.

As quantum computing advances towards practical applications, reducing errors remains a crucial frontier for developing near-term devices. Errors in the quantum gates and quantum state readout result in noisy circuits, which would prevent the acquisition of the exact expectation values of the observables. Although ultimate robustness to errors is known to be achievable by quantum error correction-based fault-tolerant quantum computing, its successful implementation demands large-scale quantum processors with low average error rates that are not yet widely available. In contrast, quantum error mitigation offers more immediate and practical techniques, which do not require extensive resources and can be readily applied to existing quantum devices to improve the accuracy of the expectation values. Here, we report the implementation of a zero-noise extrapolation-based error mitigation technique on a silicon spin qubit platform. This technique has recently been successfully demonstrated for other platforms such as superconducting qubits, trapped-ion qubits, and photonic processors. We first explore three methods for amplifying noise on a silicon spin qubit: global folding, local folding, and pulse stretching, using a standard randomized benchmarking protocol. We then apply global folding-based zero-noise extrapolation to the state tomography and achieve a state fidelity of 99.96% (98.52%), compared to the unmitigated fidelity of 75.82% (82.16%) for different preparation states. These results show that the zero-noise extrapolation technique is a versatile approach that is generally adaptable to quantum computing platforms with different noise characteristics through appropriate noise amplification methods.

The rapidly growing number of qubits in semiconductor quantum computers requires a scalable control interface, including the efficient generation of dc bias voltages for gate electrodes. To avoid unrealistically complex wiring between any room-temperature electronics and the cryogenic qubits, this article presents an integrated cryogenic solution for the bias-voltage generation and distribution for large-scale semiconductor spin-qubit quantum processors. A dedicated cryogenic CMOS (cryo-CMOS) demultiplexer and a cryo-CMOS dc digital-to-analog converter (DAC) have been developed in a 22-nm fin field-effect transistor process to control a codeveloped 2-D array designed with 648 single-hole transistors. Thanks to the dissipation below 120 µ W, the whole system operates at temperatures below 70 mK in a custom-built electrical/mechanical infrastructure embedded in a standard single-pulse-tube dilution refrigerator. The bias voltages generated by the cryo-CMOS DAC are demultiplexed to sample-and-hold structures, allowing to store 96 unique bias voltages over a 3 V range with a voltage drift between 60 µ V / s and 18 mV/s. This work demonstrates a tight integration at mK temperatures of cryo-CMOS bias generation and distribution with a dedicated large-scale quantum device. This showcases how this approach simplifies the wiring to the electronics, thus facilitating the scaling up of quantum processors toward the large number of qubits required for a practical quantum computer.

The electrical characterisation of classical and quantum devices is a critical step in the development cycle of heterogeneous material stacks for semiconductor spin qubits. In the case of silicon, properties such as disorder and energy separation of conduction band valleys are commonly investigated individually upon modifications in selected parameters of the material stack. However, this reductionist approach fails to consider the interdependence between different structural and electronic properties at the danger of optimising one metric at the expense of the others. Here, we achieve a significant improvement in both disorder and valley splitting by taking a co-design approach to the material stack. We demonstrate isotopically purified, strained quantum wells with high mobility of 3.14(8) × 10⁵ cm² V⁻¹ s⁻¹ and low percolation density of 6.9(1) × 10¹⁰ cm⁻². These low disorder quantum wells support quantum dots with low charge noise of 0.9(3) μeV Hz^−1/2 and large mean valley splitting energy of 0.24(7) meV, measured in qubit devices. By striking the delicate balance between disorder, charge noise, and valley splitting, these findings provide a benchmark for silicon as a host semiconductor for quantum dot qubits. We foresee the application of these heterostructures in larger, high-performance quantum processors.

We grow strained Ge/SiGe heterostructures by reduced-pressure chemical vapor deposition on 100 mm Ge wafers. The use of Ge wafers as substrates for epitaxy enables high-quality Ge-rich SiGe strain-relaxed buffers with a threading dislocation density of ( 6 ± 1 ) × 10 5 cm − 2 , nearly an order of magnitude improvement compared to control strain-relaxed buffers on Si wafers. The associated reduction in short-range scattering allows for a drastic improvement of the disorder properties of the two-dimensional hole gas, measured in several Ge/SiGe heterostructure field-effect transistors. We measure an average low percolation density of ( 1.22 ± 0.03 ) × 10 10 cm − 2 and an average maximum mobility of ( 3.4 ± 0.1 ) × 10 6 cm 2 / Vs and quantum mobility of ( 8.4 ± 0.5 ) × 10 4 cm 2 / Vs when the hole density in the quantum well is saturated to ( 1.65 ± 0.02 ) × 10 11 cm − 2 . We anticipate immediate application of these heterostructures for next-generation, higher-performance Ge spin-qubits, and their integration into larger quantum processors.

Charge noise in the host semiconductor degrades the performance of spin-qubits and poses an obstacle to control large quantum processors. However, it is challenging to engineer the heterogeneous material stack of gate-defined quantum dots to improve charge noise systematically. Here, we address the semiconductor-dielectric interface and the buried quantum well of a ²⁸Si/SiGe heterostructure and show the connection between charge noise, measured locally in quantum dots, and global disorder in the host semiconductor, measured with macroscopic Hall bars. In 5 nm thick ²⁸Si quantum wells, we find that improvements in the scattering properties and uniformity of the two-dimensional electron gas over a 100 mm wafer correspond to a significant reduction in charge noise, with a minimum value of 0.29 ± 0.02 μeV/Hz^½ at 1 Hz averaged over several quantum dots. We extrapolate the measured charge noise to simulated dephasing times to CZ-gate fidelities that improve nearly one order of magnitude. These results point to a clean and quiet crystalline environment for integrating long-lived and high-fidelity spin qubits into a larger system.

As spin-based quantum processors grow in size and complexity, maintaining high fidelities and minimizing crosstalk will be essential for the successful implementation of quantum algorithms and error-correction protocols. In particular, recent experiments have highlighted pernicious transient qubit frequency shifts associated with microwave qubit driving. Work-Arounds for small devices, including prepulsing with an off-resonant microwave burst to bring a device to a steady state, wait times prior to measurement, and qubit-specific calibrations all bode ill for device scalability. Here, we make substantial progress in understanding and overcoming this effect. We report a surprising nonmonotonic relation between mixing chamber temperature and spin Larmor frequency which is consistent with observed frequency shifts induced by microwave and baseband control signals. We find that purposefully operating the device at 200 mK greatly suppresses the adverse heating effect while not compromising qubit coherence or single-qubit fidelity benchmarks. Furthermore, systematic non-Markovian crosstalk is greatly reduced. Our results provide a straightforward means of improving the quality of multispin control while simplifying calibration procedures for future spin-based quantum processors.