39 records found
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Integrating low-temperature carbon nanotubes as vertical interconnects in Si technology
Aluminum-induced iso-epitaxy of silicon for low-temperature fabrication of centimeter-large p+n junctions
VUV/low-energy electron Si photodiodes with postmetal 400°C PureB deposition
Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits
Integrating carbon nanotubes as vias in a monolithic 3DIC process
Epitaxial growth of large-area p+n diodes at 400 ºC by aluminum-induced crystallization
Low-temperature bottom-up integration of carbon nanotubes for vertical interconnects in monolithic 3D integrated circuits
Electrical characterization of carbon nanotube vertical interconnects with different lengths and widths
Integrating low temperature aligned carbon nanotubes as vertical interconnects in Si technology
Electrical characterisation of low temperature aligned carbon nanotubes for vertical interconnects
Integration of MOSFETs with SiGe dots as stressor material
Low-complexity full-melt laser-anneal process for fabrication of low-leakage implanted ultrashallow junctions
Excimer laser crystallization of thick a-Si for photodiode and solar cell applications
Location- and orientation-controlled, large single grain silicon induced by pulsed excimer laser crystallization
Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits
MOSFETS on self assembled SiGe dots with strain-enhanced mobility
Strained single grain silicon n- and p- channel thin-film transistors by excimer laser
High performance single-grain Ge TFTs without seed substrate
n-Channel MOSFETs fabricated on SiGe dots for strain-enhanced mobility
Thermal budget considerations for excimer laser annealing of implanted dopants